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º» Á¦Ç°Àº micromachined (MEMS)
scanning thermal probe¿¡ ±Ù°£ÇÏ´Â Á¤¹Ðµµ°¡ ¸Å¿ì ³ôÀº ºñÆÄ±« ±â¹ý¿¡ ÀÇÇÑ SThM¿ë thermal probe ÀÔ´Ï´Ù.
AFM/SPM µîÀÇ ¿øÀÚÇö¹Ì°æ Á¦Ç°¿¡ 100 nm ÀÌÇÏÀÇ Á÷°æÀ» °¡Áø probe tipÀ» ¿¬°áÇØ scanning ÇÔÀ¸·Î½á ½Ã·áÀÇ ¾î´À À§Ä¡ µçÁö
±¹¼Ò¿Çؼ®ÀÌ °¡´ÉÇÑ Á¦Ç°ÀÔ´Ï´Ù.
FEATURES ¢Ã Temperature and
topographic data can be
gathered simultaneously. ¢Ã The probe is interfaced
with the module and the
module cables plug into the AFM controller. ¢Ã The ST
50¢â thermal unit is easy to interface with an
AFM/SPM.
SPECIFICATION 0 -250 ¡É Temperature
range Norminal Resistance: 20-40 Ohm Topographical Resolution: < 1
nm Thermal Conductance change : < 3 pW/K
detectable
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 ¢Ã Scanning thermal microscopy is an
add-on option to the standard AFM system. ¢Ã The key element of the SThM
is a micromachined thermal probe. ¢Ã PicoCal has developed a thermal control
circuit unit, ST 50¢â, that transmits temperature contrast imaging. ¢Ã The
ST50 provides thermal conductivity analysis with a gain of up to x 10,000. ¢Ã
The probe signal is connected to the INPUT of the module using a BNC cable and
the OUTPUT of the module to the AFM controller.
PCTP100 Thermal Probes
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PICOCALs high precision, non-destructive technique is based on a proprietary
micromachined (MEMS) scanning thermal probe. The probe tip in the figure has
less than 100 nm diameter. PicoCals thermal probe is scanned across the sample
and measurements are made at every location. Key probe features include: high
thermal sensitivity due to high thermal isolation, high thermal resolution,
mondestructive (low spring constant prevents damage to sample), high reliability
and repeatability in probes performance by using batch processing, and high
spatial resolution with integrated tip with less than 100 nm tip diameter.
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Modes of Operation: Thermal conductance mapping; Temperature mapping;
Topographical mapping; Subsurface Mapping; Microcalorimetry and glass transition
temperature; Mapping of thermal properties (thermal conductivity, heat capacity
etc.)
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Some Applications include: Subsurface imaging, defect detection,
nanocharacterization, characterize thin polymers, biological imaging, and
photoresist metrology
Measured Probe Performance: Lateral Spatial Resolution < 100 nm; Tip
Temperature Resolution < 10 mK; Thermal Conductance Change< 3 pW/K;
Spring Constant < 0.1 N/m.
Purchasing: Minimum order of 10 probes. Allow 30-60 days for delivery.
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