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Sputtering Targets

Different Shapes of Sputtering Targets


(주)연진에스텍Planar (flat) TargetRotary (cylindrical) Target, Circular TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.


Pure Metal Target

Lutetium Planar Target

YEONJIN S-Tech Corporation 2025-11-19 11:41:34 18


 

Lutetium Planar Target Description

SAM’s lutetium planar targets are produced from lutetium metal with purity ranging from 99.9% to 99.99% (3N-4N). These targets come in diameters (50-200 mm) and thicknesses (3-10 mm). Custom bonding options (e.g., Cu backing plates) and fine-grained structures (<50 µm) ensure consistent sputtering and thermal stability. Each target is vacuum-sealed in argon-filled containers to prevent oxidation and undergoes XRD crystallography and ICP-MS impurity analysis, meeting ASTM F3091 standards. Technical support is provided, including sputtering parameter advice (e.g., DC power ranges), and rapid delivery (3-4 weeks).

 

Lutetium Planar Target Specifications

Properties

  • Purity: 99.9%
  • Theoretical Density: 9.8404 g/cm³
  • Melting Point: 1663 °C
  • Boiling Point: 3395 °C
  • Product Shape: Rectangular, or customized upon request
  • Product Size: Customized
    The product information above is based on theoretical data. For specific requirements, please contact us.

 

Lutetium Planar Target Applications

  1. Medical Imaging: Lu-177 isotope films for targeted cancer radiotherapy.
  2. Catalysis: Lu-doped coatings for petroleum refining and chemical synthesis.
  3. Scintillators: Lu-based films in PET scanners and radiation detectors.
  4. Electronics: High-k dielectric layers for semiconductor devices.

 

Lutetium Planar Target Packaging

The products are packaged in cartons customized according to the material dimensions. Small items are securely packed in PP boxes, while larger items are placed in custom wooden crates. We strictly follow packaging requirements and use appropriate cushioning materials for optimal protection during transport.

Packaging Options: Carton, Wooden Box, or Customized.

 

Manufacturing Process

  • Manufacturing Process Flow

  • Testing Method
    • Chemical Composition Analysis: Conducted using GDMS or XRF to confirm purity compliance.
    • Mechanical Properties Testing: Includes tests for tensile strength, yield strength, and elongation to assess material performance.
    • Dimensional Inspection: Measures thickness, width, and length for tolerance adherence.
    • Surface Quality Inspection: Inspects for defects like scratches or cracks via visual and ultrasonic methods.
    • Hardness Testing: Assesses material hardness for mechanical reliability.

 

Lutetium Planar Target FAQs

Q1: What purity grades are available for lutetium targets?
A1: SAM provides a 99.9% (3N) purity grade, with trace impurity data included in Certificates of Analysis (CoA).

Q2: Can I request custom target dimensions or bonding configurations?
A2: Yes. Custom diameters (50-200 mm), thicknesses (3-10 mm), and bonded backings (e.g., Cu, Mo) are available. Submit specifications for fast prototyping.

Q3: How is oxidation prevented during storage and shipping?
A3: Targets are vacuum-sealed in argon-filled containers with desiccant packs. After delivery, storage in dry inert gas (Ar/N₂) is recommended.

 

Performance Comparison Table with Competitive Products

Lutetium Rotary Target vs. Lutetium Planar Target

Feature

Lutetium Rotary Target

Lutetium Planar Target

Material Utilization

80-90%

30-40%

Service Life

Longer

Shorter

Coating Uniformity

More uniform

May vary

Production Cost

Higher initial, economical long term

Lower initial, frequent replacement

Applications

Large-area coatings

Small-area coatings

Sputtering Stability

Stable

Less stable

Compatible Equipment

Requires rotary sputtering

Compatible with planar sputtering systems

 

Related Information

  1. Raw Materials – Lutetium
    Atomic Number: 71 | Melting Point: 1663°C | Density: 9.84 g/cm³
    Key Uses: Cancer therapy, catalysis, electronics.
    Fun Fact: Lutetium is the heaviest and hardest rare-earth metal.

 

 

 

  • High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다. 
  • Material Variety  다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다. 
  • Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다. 
  • Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다. 
  • Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다. 


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