Different Shapes of Sputtering Targets
(주)연진에스텍은 Planar (flat) Target과 Rotary (cylindrical) Target, Circular Target 및 Ring Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.
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Scandium Planar Target Overview
SAM’s scandium targets are fabricated from high-purity scandium metal (99.9%), and come in diameters ranging from 50 mm to 200 mm, with thicknesses between 3 mm and 10 mm. The targets are engineered to have a grain size smaller than 50 µm and a density greater than 95%, ensuring consistent sputtering and the production of high-quality films. Each target is packaged in argon-filled, vacuum-sealed containers and undergoes rigorous validation through ICP-MS and XRD to comply with ASTM F3091 standards.
Scandium Planar Specifications
- Purity: 99.9%
- Melting Point: 1814°C
- Boiling Point: 3103°C
- Shape: Rectangular or customized as per request
- Size: Customized upon request
Note: All product specifications are based on theoretical data. Please contact us for any specific requirements or detailed inquiries.
Scandium Planar Applications
- Aerospace Alloys: Scandium-doped aluminum films for lightweight, high-strength components.
- Solid Oxide Fuel Cells (SOFCs): Scandium-stabilized zirconia coatings for electrolytes.
- Lasers & Lighting: Scandium-based films for high-intensity lamps and UV lasers.
- Semiconductors: Scandium nitride layers for high-electron-mobility transistors (HEMTs).
Scandium Planar Packaging
SAM’s scandium planar targets are packaged in cartons, with sizes tailored to the dimensions of the material. Smaller items are packed in secure PP boxes, while larger items are carefully placed in custom wooden crates. The packaging ensures optimal protection during transit, with cushioning materials chosen to prevent damage.
Packaging Options: Cartons, Wooden Boxes, or Custom Solutions.
Scandium Planar Manufacturing Process
- Manufacturing Process Flow Overview
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- Testing Methods
- Chemical Composition Analysis: Ensures the required purity level through techniques like GDMS or XRF.
- Mechanical Properties Testing: Includes tests for tensile strength, yield strength, and elongation.
- Dimensional Inspection: Verifies thickness, width, and length according to tolerances.
- Surface Quality Inspection: Inspects for surface defects like cracks, scratches, or inclusions using visual and ultrasonic methods.
- Hardness Testing: Assesses material hardness to ensure mechanical reliability.
Scandium Planar FAQs
- Q1: What purity grades are available for scandium targets?
- A1: SAM provides 99.9% purity (3N) scandium, with impurity levels under 100 ppm, certified by ICP-MS.
- Q2: How should scandium targets be stored?
- A2: Store in dry argon environments to avoid oxidation. Handle with gloves to prevent contamination.
- Q3: Are your scandium targets compatible with magnetron sputtering systems?
- A3: Yes, SAM targets are compatible with ISO/KF flanges and most magnetron sputtering systems. Adapter solutions are available.
Performance Comparison: Scandium Rotary vs. Planar Target
|
Feature |
Scandium Rotary Target |
Scandium Planar Target |
|---|---|---|
|
Material Utilization |
Up to 80-90% |
Around 30-40% |
|
Service Life |
Longer |
Shorter |
|
Coating Uniformity |
More uniform |
May have variations |
|
Production Cost |
Higher initial cost |
Lower initial cost |
|
Applications |
Large-area coatings |
Small-area coatings |
|
Sputtering Stability |
More stable |
Less stable |
|
Compatible Equipment |
Rotary sputtering systems |
Traditional planar systems |
Raw Material Details
- Atomic Number: 21
- Melting Point: 1541°C
- Density: 2.99 g/cm³
- Common Uses: Aerospace, fuel cells, lighting
- Fun Fact: Scandium is lighter than aluminum but significantly strengthens it when alloyed.
- High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다.
- Material Variety 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
- Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
- Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
- Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.
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