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Sputtering Targets

Different Shapes of Sputtering Targets


(주)연진에스텍Planar (flat) TargetRotary (cylindrical) Target, Circular TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.


Compound Target

Tantalum Niobium Target (TaNb Target)

YEONJIN S-Tech Corporation 2025-11-06 11:30:27 71


 

Overview of Tantalum Niobium Target (TaNb Target)

 

 

The TaNb Target is a premium alloy sputtering material that combines the outstanding corrosion resistance and high melting point of tantalum with niobium’s exceptional mechanical properties and superconducting abilities. This alloy delivers remarkable thermal stability, maintaining its integrity and performance even at elevated temperatures. Tantalum enhances the material’s resistance to oxidation and chemical corrosion, while niobium boosts the alloy’s strength and introduces superconducting properties, making it suitable for specialized applications in electronics and aerospace industries. The TaNb Target exhibits excellent thermal and electrical conductivity along with superior mechanical strength, ensuring reliable and consistent film deposition in rigorous environments. Additionally, it boasts high wear resistance, making it perfect for high-performance thin film coatings. The target’s homogeneous and refined microstructure ensures uniformity during sputtering, facilitating a smooth deposition process.

 

Specifications of Tantalum Niobium Target (TaNb Target)

 

Material Composition: Ta, Nb
Purity: 99.95%
Shape: Planar Disc

Please note that the specifications provided are based on theoretical data. For customized specifications and detailed inquiries, please contact us directly.

 

Custom Dimensions

  • Diameter: Tailored to specific requirements
  • Thickness: Adjustable based on application needs

 

Applications of Tantalum Niobium Target (TaNb Target)

  • Semiconductor Manufacturing: Utilized for depositing thin films in semiconductor devices where high-temperature stability and mechanical strength are essential, especially for high-performance capacitors and resistors.

  • Aerospace Coatings: Employed in the aerospace industry for coating components such as turbine blades and engine parts, which must endure extreme temperatures and harsh environments due to the high melting point and corrosion resistance of TaNb.

  • Superconducting Applications: The superconducting properties of niobium make TaNb targets ideal for depositing superconducting films used in MRI machines, quantum computing elements, and superconducting magnets.

  • High-End Electronics: Used for applying high-quality, durable coatings on advanced electronic devices, including sensors, microelectromechanical systems (MEMS), and other high-performance components that require superior conductivity and durability.

  • Energy Industry: TaNb targets are utilized in the energy sector for manufacturing components in reactors and energy storage devices, where resistance to high temperatures and corrosion is critical.

  • Medical Devices: Due to its biocompatibility, TaNb is also used for coating medical implants and devices, enhancing their durability and corrosion resistance in bodily environments.

 

Packaging Options for Tantalum Niobium Target (TaNb Target)

Our TaNb Targets are meticulously packaged to ensure their integrity during transit. Depending on the size and dimensions, smaller targets are securely placed in polypropylene (PP) boxes, while larger ones are shipped in custom-built wooden crates. We prioritize customized packaging solutions and use appropriate cushioning materials to provide maximum protection during transportation.

Packaging Options:

  • Carton
  • Wooden Crate
  • Custom Packaging

 

Manufacturing Process Overview

Testing Methods

  1. Chemical Composition Analysis: Utilizes techniques such as Glow Discharge Mass Spectrometry (GDMS) or X-Ray Fluorescence (XRF) to verify purity and composition.
  2. Mechanical Properties Testing: Evaluates tensile strength, yield strength, and elongation to assess material performance.
  3. Dimensional Inspection: Measures thickness, width, and length to ensure compliance with specified tolerances.
  4. Surface Quality Inspection: Identifies defects like scratches, cracks, or inclusions through visual and ultrasonic examinations.
  5. Hardness Testing: Determines material hardness to confirm uniformity and mechanical reliability.

 

Frequently Asked Questions about Tantalum Niobium Target (TaNb Target)

Q1: What are the primary advantages of using TaNb targets?
A1: TaNb targets offer exceptional thermal stability, high mechanical strength, and superconducting properties, making them ideal for thin film deposition in high-performance semiconductor, aerospace, and energy applications.

Q2: Can the size or shape of the TaNb target be customized?
A2: Yes, Stanford Advanced Materials provides customized TaNb targets in various sizes and shapes to meet specific application requirements. Please contact us for tailored options.

Q3: Which sputtering methods are compatible with TaNb targets?
A3: TaNb targets are compatible with both DC and RF sputtering methods and are suitable for high-power sputtering systems, ensuring consistent and high-quality deposition for thin film applications.

 

Performance Comparison: TaNb Target vs. Ta Target vs. Nb Target

Property

TaNb Target

Tantalum (Ta) Target

Niobium (Nb) Target

Material Composition

Tantalum Niobium Alloy

Pure Tantalum

Pure Niobium

Applications

Thin Films, Coatings

Electronics, Alloys

Electronics, Alloys

Melting Point

~2,950°C

~2,996°C

~2,468°C

Density (g/cm³)

~16.5

16.6

8.57

Conductivity

Low

Low

High

Cost

High

High

Moderate

Hardness

High

High

Moderate

 

Additional Information

Raw Materials – Tantalum (Ta)

Physical Properties:

  • Density: 16.6 g/cm³
  • Melting Point: 3,020°C (5,468°F)
  • Structure: Body-Centered Cubic (BCC)
  • Magnetic: Non-magnetic

Chemical Properties:

  • Tantalum is a dense, corrosion-resistant refractory metal with exceptional resistance to acids, forming a protective oxide layer.
  • Highly ductile and biocompatible, it maintains strength at elevated temperatures, making it ideal for electronics, aerospace, and medical applications.
  • Its excellent capacitance properties make tantalum a key material in capacitor production.

Industrial Applications:

  • Superconductors: Essential for creating superconducting magnets and electronic components.
  • Aerospace Alloys: Enhances strength and durability in aerospace components.
  • Medical Devices: Used in implants and medical instruments due to its biocompatibility.

 

Raw Materials – Niobium (Nb)

Physical Properties:

  • Density: 8.57 g/cm³
  • Melting Point: 2,468°C (4,474°F)
  • Structure: Body-Centered Cubic (BCC)
  • Magnetic: Non-magnetic

Chemical Properties:

  • Niobium is a soft, gray, ductile metal with a high melting point, primarily used in alloying, especially with steel, to improve strength, weldability, and corrosion resistance.
  • Its excellent superconducting properties make it ideal for applications in superconducting magnets and particle accelerators.
  • Niobium’s corrosion resistance and high melting point make it useful in extreme environments, such as nuclear reactors and energy applications.

Industrial Applications:

  • Alloying Agent: Improves strength and corrosion resistance in steel and other alloys.
  • Superconducting Magnets: Used in MRI machines and particle accelerators.
  • Aerospace Components: Enhances the performance of jet engines and rocket parts.
  • Energy Applications: Utilized in nuclear reactors and energy storage devices.

 

 

 

 

  • High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다. 
  • Material Variety  다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다. 
  • Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다. 
  • Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다. 
  • Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다. 


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