Different Shapes of Sputtering Targets
(주)연진에스텍은 Planar (flat) Target과 Rotary (cylindrical) Target, Circular Target 및 Ring Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.
- High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다.
- Material Variety 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
- Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
- Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
- Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.
Zinc Nitride Sputtering Target, Zn3N2
Zinc Nitride Sputtering Target Specification
|
Symbol |
Zn₃N₂ |
|
Appearance |
Gray solid |
|
Purity |
99.9% |
|
Density |
6.2 g/cm³ |
|
Melting Point |
~700 °C (decomposes) |
|
Sputtering Method |
RF or reactive DC sputtering |
|
Available Sizes |
Dia. 2″–6″, Thickness: 0.125″–0.25″ |
|
Bonding Options |
Elastomer bonding recommended |
|
Custom Options |
Available on request |
Note: Zn₃N₂ decomposes at elevated temperatures—process with caution and under controlled atmosphere.
Zinc Nitride Sputtering Target Application
Zinc nitride sputtering targets are ideal for RF or reactive sputtering of thin films in:
-
Optoelectronic Devices
Thin film transistors (TFTs), photodetectors, and sensor layers -
Semiconductors
Wide-bandgap compound for n-type channels and buffer layers -
Display Technologies
Transparent conductive films and backplane components for LCDs and OLEDs -
Photovoltaics
Window layers and buffer coatings in solar cells -
Glass Coatings
Functional coatings for anti-reflection, IR shielding, or architectural glass -
Optical Storage & Data Layers
Layer materials in optical data media with low optical loss
Bonding Services
Due to its moderate thermal stability and ceramic-like behavior, elastomer bonding is recommended for zinc nitride targets to reduce thermal shock and mechanical stress.
Backing plates (copper, stainless steel, molybdenum) are available to match your system specifications.
Packaging & Quality Assurance
Each target is vacuum-sealed and cushioned to prevent damage during transit. Labels and documentation include full material traceability. SAM applies stringent quality controls to ensure high purity, phase stability, and consistent microstructure.
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