Different Shapes of Sputtering Targets
(주)연진에스텍은 Planar (flat) Target과 Rotary (cylindrical) Target, Circular Target 및 Ring Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.
- High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다.
- Material Variety 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
- Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
- Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
- Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.
AZO Sputtering Target, Aluminum-doped Zinc Oxide
AZO Sputtering Target Description
AZO sputtering target, or aluminum-doped zinc oxide target, contains the element of Al, Zn and O.
Aluminum, or aluminium, is a chemical element derived from the alum name in Latin, and “alumen” stands for bitter salt. “Al” is the standard chemical symbol for aluminum. Aluminum films are often used as reflective coatings on telescopes, car headlights, mirrors, packaging and toys. The Aluminum target is widely used in the aerospace, automotive lighting, OLED and optical industries.
Zinc is a chemical element that originated in German as “zinc”; zinc is also considered that it be derived from Persian word “sing”, which means stone. “Zn” is the standard chemical symbol for zinc. Its atomic number in the periodic table is 30.
AZO Sputtering Target Specification
|
Material Type |
Aluminum doped Zinc Oxide |
|
Symbol |
AZO |
|
Appearance |
Solid in various forms |
|
Available Sizes |
Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″ |
AZO Sputtering Target Manufacturing Process
• Manufacturing – Cold pressed – Sintered, Elastomer bonded to the backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment
AZO Sputtering Target Application
AZO sputtering target is used for thin film deposition, typically for fuel cell, decoration, semiconductor, display, LED and photovoltaic devices, glass coating, etc. Aluminum-doped zinc oxide was investigated for replacing ITO, e.g., in solar cells, due to the concern of indium shortage and increasing price.
AZO Sputtering Packing
Aluminum-doped zinc oxide sputtering target is clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.
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