Compact mini MBE system for surface science samples

Compact and versatile research MBE system with ultra-small footprint

• Applications: heat novel materials research and UHV surface science
• 6 source ports DN40CF (O.D. 2.75’’)
• Wide range of source options
• Sample size : flag style scientific sample plate 10x10 mm²
• Effective UHV pumping system
• Water cooled chamber body, no LN₂ infrastructure needed
• Low energy consumption, economic operation, minimal site requirements
• In-situ monitoring capability
• Professional support by PhD MBE experts

General Information

The OCTOPLUS 200 system is ideally suited for material deposition on small samples. It provides good access and easy operation and maintenance. The chamber design of the OCTOPLUS 200 plus various state-of-the-art components allow layer by layer precise MBE growth.

Outstanding features of the OCTOPLUS 200 are the high reliability and versatility of the system and its small footprint. These features make the OCTOPLUS 200 system particularly suited for applications in research and development. Its ultra compact footprint allows it to be integrated in tight laboratory spaces with other existing in-situ UHV surface analysis equipment.

The standard version of the OCTOPLUS 200 comprises six ports with DN40CF (O.D. 2.75’’) flange size. By using Source Clusters many more source materials can be integrated into the system. A rapid pump-down load lock chamber with a horizontally working transfer-rod system allows the user an easy substrate introduction without breaking the vacuum of the MBE chamber. The transfer system can be easily adapted to integrate with other existing surface analysis equipment for fundamental research, e.g. at synchrotron facilities.

We provide different kinds of effusion cells, valved cracker sources, gas sources and substrate manipulators according to all our customers’ requirements. A well-manageable in-situ characterization is obtained by using beam-flux-gauges, pyrometers, RHEED systems or quadrupole mass analyzers (QMA).

We are happy to discuss your MBE system specifications and give competent advice for your application. Do not hesitate to contact us.

Options for OCTOPLUS 200

• Additional load lock or peparation chambers
• Wafer transfer system
• Effusion cells, source clusters, electron beam evaporators, cracker and valved cracker sources, manipulators, power supplies and control units
• Pumping system (ion getter pumps, turbopumps, cryopumps etc.)
• Control system
• In-situ characterization tools, e.g. ion gauge, Quartz Crystal Microbalance (QCM), pyrometer, RHEED, QMA

Technical Data

Examples for applications and corresponding sources