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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 허용 오차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Cerium Oxide Sputtering Target, CeO2

 

Cerium Oxide Sputtering Target

Description

 

Cerium oxide sputtering target from Stanford Materials Corporation (SMC) is an oxide sputtering material with the formula CeO2.

 

Cerium Oxide Sputtering Target Specification

Material Type

Cerium (IV) Oxide

Symbol

CeO2

Color/Appearance

White or Pale Yellow, Crystalline Solid

Melting Point (°C)

~2,600

Theoretical Density (g/cc)

7.13

Sputter

RF, RF-R

Type of Bond

Indium, Elastomer

Comments

Very little decomposition.

 

Cerium Oxide Sputtering Target Bonding

Indium Bonding and Elastomeric Target Bonding Services are available for cerium oxide sputtering targets. Stanford Materials Corporation (SMC) is devoted to machining standard backing plates and working together with the Taiwan Bonding Company for providing bonding services.

 

Cerium Oxide Sputtering Target Application

The cerium oxide sputtering target is used for thin film deposition, decoration, semiconductor, display, LED and photovoltaic devices, functional coating as nicely as other optical information storage space industry, glass coating industry like car glass and architectural glass, optical communication, etc.

 

Packaging

Our cerium oxide sputtering target is clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

 

 

 

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