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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 허용 오차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


Pure Metal Target

Cerium Sputtering Target, Ce ( Discontinued )


 

Cerium Sputtering Target 

Specification

Material Type

Cerium

Symbol

Ce

Color/Appearance

Silvery White, Metallic

Melting Point

798°C

Density

~6.70g/cc

Thermal Conductivity

1 W/m.K

Coefficient of Thermal Expansion

6.3 x 10-6/K

Available Sizes

Dia.: 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

We also offer other customized shapes and sizes of the sputtering targets, please send us an inquiry for more information.

 

Cerium Sputtering Target Description

Stanford Materials Corporation (SMC) specializes in supplying high quality sputtering targets. SMC can offers a full line of sputtering targets with various compositions from industrial grade to super high purity. Our standard Sputtering Targets for thin film are available monoblock or bonded with dimensions and configurations up to 820 mm to work with both older sputtering devises as well as the latest process equipment. Quality is assured by our end-to-end quality control process, from powder synthesis, through densification, machining, bonding and full characterization.

Purity

>99.9%

Shape

Disc Targets, Plate Targets, Column Targets, Step Targets, Custom-made

Size

Circular: Diameter < 14inch, Thickness > 1mm; Block: Length < 32inch, Width < 12inch, Thickness > 1mm

 

Cerium Sputtering Target Application

 

Cerium sputtering target has the following applications:

• Use to manufacture aluminum alloys and in some steels and irons.

• In cast iron, opposes graphitization and produces a malleable iron

• In steels, it removes sulfides and oxides and completely detoxifies.

• In stainless steel, it is used as a precipitation-hardening agent.

 

 

 

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