We offers high-purity aluminum oxide (Al₂O₃) sputtering targets, also known as alumina sputtering targets, for thin film deposition via RF magnetron sputtering. As a chemically stable, wide-bandgap ceramic material, Al₂O₃ is ideal for use in insulating, dielectric, and optical coatings.
Our alumina targets are fabricated with high density and ultra-fine microstructure, ensuring low arcing, stable deposition rates, and uniform thin film quality.
Aluminum Oxide Sputtering Target Specification
|
Property |
Value |
|
Compound |
Aluminum Oxide (Al₂O₃) |
|
Appearance |
White, crystalline solid |
|
Purity Options |
99.9%, 99.95%, 99.99% |
|
Melting Point |
2,072 °C |
|
Theoretical Density |
3.97 g/cm³ |
|
Z Ratio |
0.336 |
|
Sputtering Method |
RF, RF-R |
|
Available Sizes |
Dia. 1″–6″, Thick. 0.125″–0.25″ |
|
Bonding Methods |
Indium (standard), Elastomer |
|
Custom Shapes |
Available upon request |
Note: Al₂O₃ is an electrical insulator and requires RF sputtering systems.
Aluminum Oxide Sputtering Target Application
Aluminum oxide sputtering targets are widely used in:
-
Semiconductor Devices
Gate dielectrics, passivation layers, and diffusion barriers. -
Display & LED Coatings
Transparent dielectric films for TFTs, OLEDs, and LEDs. -
Photovoltaics
Surface passivation and insulating layers in solar cells. -
Protective Optical Coatings
High-durability layers for lenses, mirrors, and AR coatings. -
Decorative & Anti-corrosive Films
Durable oxide films for consumer electronics and automotive trim.
Aluminum Oxide Sputtering Target Bonding Methods
Al₂O₃ targets are brittle ceramic materials and are typically bonded for secure operation in high-power systems. We offer:
-
Indium Bonding – High thermal conductivity, easy to remove
-
Elastomer Bonding – Flexible interface for stress-sensitive systems
-
Custom backing plates – Copper, molybdenum, stainless steel available
Packaging
All alumina targets are cleanroom-packaged, sealed against moisture, and foam-protected to prevent cracking or contamination. Batch COA and purity certificates are provided with every shipment.