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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 허용 오차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


FLUORIDE TARGET

Magnesium Fluoride Sputtering Target, MgF2


 

 

High Purity MgF2 Sputter Targets for Thin-film

Application

 

Stanford Advanced Materials (SAM) supplies high-purity magnesium fluoride sputtering targets for optical and electronic thin-film applications. With excellent UV transmission and chemical stability, MgF₂ is ideal for coatings that require high transparency and environmental resistance.

 

 

Magnesium Fluoride Sputtering Target Specification

Property

Value

Material

Magnesium Fluoride (MgF₂)

Appearance

White, Crystalline Solid

Melting Point

1,261 °C

Density

3.15 g/cm³

Sputtering Type

RF

Bonding Options

Indium, Elastomer

Available Sizes

Dia. 1″–6″, Thick. 0.125″–0.25″

Substrate Notes

Avoid W; Mo is compatible

Substrate temperature and deposition rate should be carefully controlled to ensure coating quality and target longevity.

 

 

Product Description

Magnesium Fluoride (MgF₂) is a durable, transparent ceramic material widely used in optical coatings due to its high transmission from vacuum UV to the infrared spectrum (~120 nm–8 µm). It is naturally found as the mineral sellaite. MgF₂ thin films are used in laser opticsspace opticsantireflective coatings, and semiconductor passivation layers.

This sputtering target is precisely engineered for stable and uniform thin-film deposition, ideal for both reactive and non-reactive RF sputtering systems.

 

 

Applications

Magnesium fluoride sputtering targets are widely used in:

  • Optical Coatings – UV lenses, IR windows, camera optics

  • Semiconductors – Passivation and protective dielectric layers

  • Displays & LEDs – Light outcoupling and anti-glare coatings

  • Photovoltaics – Transparent insulating layers

  • Space and Aerospace Optics – Telescopic and sensor coatings

 

 

Bonding Services

SAM offers two bonding options to optimize thermal and mechanical performance:

  • Indium Bonding – Best for low thermal stress and temporary bonding

  • Elastomer Bonding – Recommended for brittle ceramics like MgF₂ to absorb thermal expansion stress

We also machine standard or custom backing plates (e.g., Mo, Cu, SS) to support your specific sputtering system.

 

 

Packaging & Quality

  • Vacuum-sealed and foam-protected for maximum safety

  • Clearly labeled with batch number and certificate of analysis

  • Shipped in anti-static, cleanroom-compatible containers

 

 

 

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