Different Shapes of Sputtering Targets
(주)연진에스텍은 Planar (flat) Target과 Rotary (cylindrical) Target, Circular Target 및 Ring Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.
Magnesium Oxide Sputtering Target, MgO
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High Purity Magnesium Oxide Sputtering Target for Thin-film Coating
Magnesium Oxide Sputtering Target Specification
Material Properties
|
Material |
Magnesium Oxide (MgO) |
|
Appearance |
Solid |
|
Density |
3.58 g/cm³ |
|
Melting Point |
2,852 °C |
|
Transparency Range |
0.3 to 7 µm |
Available Sizes & Options
|
Purity |
99.9%, 99.95%, 99.99% |
|
Standard Diameters |
1.0″ to 6.0″ |
|
Standard Thickness |
0.125″, 0.250″ |
|
Sputtering Method |
RF Sputtering |
|
Bonding Recommendation |
Elastomer Bonding |
Handling Note: MgO is brittle and has low thermal conductivity. We strongly recommend using mechanical clamping or our elastomer bonding service to prevent thermal shock and fracturing during use.
Magnesium Oxide Sputtering Target Applications
Magnesium oxide sputtering targets are used in a wide range of thin-film applications where insulating, transparent, or thermally resistant layers are required:
-
Semiconductor Devices
Gate dielectrics, barrier layers, and insulating films in transistor structures -
Optical Coatings
Anti-reflective layers, UV filters, and dielectric mirrors for high-precision optics -
Magnetic Storage Media
Protective and insulating layers in hard disk and magnetic recording devices -
Electronics & Displays
Thin insulating coatings in LCDs, OLEDs, and other flat panel devices -
Superconductors & Buffer Layers
Used as a stable substrate or buffer layer for YBCO and other epitaxial thin films
Magnesium Oxide Sputtering Target Bonding Services
Due to MgO’s mechanical fragility, elastomer bonding is recommended for most applications. This flexible interface helps reduce stress transfer and cracking. SAM also offers:
-
Custom bonding configurations
-
Machined backing plates (e.g., Mo, CuCrZr)
-
Mechanical clamping assistance if bonding is not used
Magnesium Oxide Sputtering Target Packaging & Handling
All of our MgO targets are vacuum-sealed and protected with anti-static foam to prevent contamination and mechanical damage in transit. Full traceability and stock control are ensured by clear labeling.
- High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다.
- Material Variety 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
- Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
- Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
- Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.
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