Different Shapes of Sputtering Targets
(주)연진에스텍은 Planar (flat) Target과 Rotary (cylindrical) Target, Circular Target 및 Ring Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.
- High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다.
- Material Variety 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
- Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
- Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
- Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.
Iridium Oxide Sputtering Target, IrO2
High Purity IrO2 Sputter Targets for Thin-film Application
Iridium oxide is a blue-black solid. IrO2 is the only well-characterized oxide of iridium. The structure of IrO2 is similar to the TiO2 rutile structure, featuring six-coordinate iridium and three-coordinate oxygen. There are several different methods for obtaining iridium oxide, which can be divided into two categories: modification and reactive deposition.
Iridium Oxide Sputtering Target Specification
|
Parameter |
Value |
|---|---|
|
Material |
Iridium Oxide (IrO₂) |
|
Appearance |
Black, Solid Target |
|
Purity |
99.9% – 99.99% |
|
Density |
11.7 g/cm³ |
|
Melting Point |
~1,100 °C |
|
Bonding Options |
Indium, Elastomer |
|
Sputtering Method |
RF or DC Reactive Sputtering |
|
Available Sizes |
Dia. 1″–6″, Thick. 0.125″–0.25″ |
|
Custom Shapes |
Available on request |
Note: Due to its brittleness and reactivity during deposition, elastomer bonding is recommended for better thermal shock absorption.
Iridium Oxide Applications
Iridium oxide sputtering targets are widely used in:
-
Microelectronic Devices – Passivation layers, barrier films
-
Electrodes – Coatings for dimensionally stable anodes in chlor-alkali electrolysis, fuel cells, and electrochemical sensors
-
Bioelectronics – Microelectrodes in electrophysiology and neural interfaces
-
Photovoltaics & Displays – Transparent conductive oxides, antireflection coatings
-
Catalysis & Energy – IrO₂ thin films as part of OER (oxygen evolution reaction) catalysts for PEM electrolyzers
Iridium Oxide Sputtering Target Bonding Services
SAM offers professional target bonding for high-temperature sputtering applications. For IrO₂, we recommend:
-
Elastomer Bonding – Best for managing thermal expansion stress
-
Indium Bonding – Optional if thermal cycling is controlled
-
Available Backing Plates: Copper, Molybdenum, Stainless Steel
Iridium Oxide Packaging
All IrO₂ targets are:
-
Vacuum-sealed in anti-static, cleanroom-grade packaging
-
Labeled with batch number and COA (Certificate of Analysis)
-
Shipped with foam protection inside impact-resistant containers
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