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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Titanium Dioxide Sputtering Target, TiO2


 

Titanium Dioxide Sputtering

Target Description

 

Titanium dioxide sputtering target from Stanford Advanced Materials contains Ti and O. Titanium dioxidetitanium dioxide structure, also known as titanium(IV) oxide or titania, is the naturally occurring oxide of titanium, chemical formula TiO2. Titanium dioxide occurs in nature as the minerals rutile and anatase, and additionally as two high pressure forms. One of these is a monoclinic baddeleyite-like form known as akaogiite, and the other is an orthorhombic α-PbO2-like form known as brookite, both of which can be found at the Ries crater in Bavaria. It is mainly sourced from ilmenite ore. This is the most widespread form of titanium dioxide-bearing ore around the world. Rutile is the next most abundant and contains around 98% titanium dioxide in the ore. The metastable anatase and brookite phases convert irreversibly to the equilibrium rutile phase upon heating above temperatures in the range 600–800 °C (1,112–1,472 °F).

 

Titanium Dioxide Sputtering Target Specification

Material Type

Titanium (IV) Oxide

Symbol

TiO2

Color/Appearance

White-Beige, Gray-Black

Theoretical Density 

4.23 g/cc

Melting Point

1,830 °C

Sputter

RF, RF-R

Type of Bond

Indium, Elastomer

Comments

Suboxide, must be reoxidized to rutile. Ta reduces TiO2 to TiO and Ti.

Available Sizes

Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

We also offer other customized shapes and sizes of the sputtering targets, please send us an inquiry for more information.

 

Titanium Dioxide Sputtering Target Application

  • Thin Film Coating:  Titanium oxide TiO2 sputtering target is used for thin film deposition, typically for fuel cell, decoration, semiconductor, display, LED and photovoltaic devices, glass coating, etc.
  • Paints and Coatings: Titanium dioxide provides opacity and durability, while helping to ensure the longevity of the paint and protection of the painted surface. Titanium dioxide is well-known for having a very high refractive index, and this has led to its common use in thin-film optics.TiO2 sputtering target is used for thin film deposition
  • Plastics, Adhesives and Rubber: Titanium dioxide can help minimize the brittleness, fading and cracking that can occur in plastics and other materials as a result of light exposure.
  • Cosmetics: Pigment-grade titanium dioxide is used in some cosmetics to aid in hiding blemishes and brightening the skin. Titanium dioxide allows for the use of thinner coatings of make-up material for the same desired effect. When used as a pigment, it is called titanium white, Pigment White 6 (PW6), or CI 77891.
  • Paper: Titanium dioxide is used to coat paper, making it whiter, brighter and more opaque.
  • Food Contact Materials and Ingredients: The opacity to visible and ultraviolet light offered by titanium dioxide protects food, beverages, supplements and pharmaceuticals from premature degradation, enhancing the longevity of the product. Specific classes of high purity pigment-grade titanium dioxide are also used in drug tablets, capsule coatings and as a decorative aid in some foods.

 

Titanium Dioxide TiO2 Sputtering Target Bonding Services

Indium Bonding and Elastomeric Target Bonding Service are available for titanium dioxide sputtering target. Stanford Advanced Materials is devoted to machining standard backing plates and working together with the Taiwan Bonding Company for providing bonding services.  

 

Titanium Dioxide TiO2 Sputtering Target Packaging

Our titanium oxide sputter targets are carefully handled to prevent damage during storage and transportation and to preserve the quality of our products in their original condition.

 

 

 

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