Faster process times with high-quality and homogenous films
SC Optima Series
SC Optima Series
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The SC Optima Series is the next generation of large batch systems for Atomic Layer Deposition (ALD). The SC Optima has been carefully optimised to deliver high-quality and uniform coatings to all types of 3D objects in record time, streamlining every step of your door-to door processes, from loading to unloading.
Experience a new level of precision and efficiency in 3D part coating with the new patent-pending chamber from Swiss Cluster. The innovative and scalable chamber has been optimally designed to adapt to all types of 3D parts and coating material to deliver exceptional coating homogeneity at unparalleled process speeds.
Our single chamber approach makes it easy to load and unload 3D parts from the cleanroom, while the rest of the system is accessed from the grey room. This also allows for ultra-fast heating and cooling of both the chamber walls and the parts themselves.
Ultra-Fast Process
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1
5 min
Loading- Closing Door
2
30 min
PumpDown/Heat-up of Chamber to 300°C from 25°C
3
150 min
Bakeout of Parts to Reach ~300°C
4
150 min
Process Time for 100nm Al₂O₃
5
100 min
Cooldown of Chamber from 300°C to 150°C / Venting
6
5 min
Open Door-Unloading
Technical Specifications
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Door-to-door process times with the standard volume of 143 L
| Chamber dimensions |
Adapted to your 3D parts and coating material 143 L – 1000 L 640x640x350 mm – 900x1600x700 mm |
| Loading |
Easy Front loading with guided cart Custom-made frame holders for 3D parts Cleanroom compatible |
| Process Temperatures |
Up to 500°C |
| Precursors |
Up to 8 gas sources with 6 individual inlets Ozone option |
| Standard Materials |
Al₂O₃, ZnO, SiO₂, TiO₂, Y₂O₃, Nitrides Novel bubbler delivery system optimised for low vapour pressure precursors 500 nm Al₂O₃ < 1% 1-sigma uniformity |
| Substrate Sizes |
Multiple substrates or 3D objects of various shapes and sizes Dimensions of chamber and holder are optimally adapted to the parts and coating material |
Optimally designed for you
The SC Optima can be customised to meet your material and process requirements.
