Different Shapes of Sputtering Targets
(주)연진에스텍은 Planar (flat) Target과 Rotary (cylindrical) Target, Circular Target 및 Ring Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.
- High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다.
- Material Variety 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
- Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
- Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
- Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.
Lithium Zinc Oxide Sputtering Target, LZO
Lithium Zinc Oxide Sputtering
Target Description
Lithium Zinc Oxide Sputtering Target is a specific material used in the process of sputtering, which is a technique used in thin film deposition for various applications such as electronics, optics, and coatings.
The sputtering target is made up of lithium zinc oxide (LiZnO), a compound composed of lithium (Li), zinc (Zn), and oxygen (O). It is typically in the form of a solid disc-shaped material with a high purity.
During the sputtering process, a high-energy plasma is created in a vacuum chamber, and ions in the plasma bombard the sputtering target. This bombardment causes atoms from the target material to be ejected or sputtered onto a substrate, creating a thin film coating.
Lithium Zinc Oxide Sputtering Target Specifications
|
Compound Formula |
Li:ZnO |
|
Molecular Weight |
88.33 |
|
Appearance |
White Target |
|
Density |
4.59 g/cm3 |
|
Available Sizes |
Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″ |
Lithium Zinc Oxide Sputtering Target Handling Notes
- Indium bonding is recommended for Lithium Zinc Oxide Sputtering Targets, due to some of its characteristics not amenable to sputtering like brittleness, low thermal conductivity, etc.
- This material has a low thermal conductivity and is susceptible to thermal shock.
Lithium Zinc Oxide Sputtering Target Application
- Transparent Conductive Oxide (TCO) Films
- Solar Panels
- Gas Sensors
- Electrochromic Devices
- Photoelectrochemical Water Splitting
- Anti-Reflection Coatings
- Flexible Electronics
Lithium Zinc Oxide Sputtering Target Packaging
Our Lithium Zinc Oxide Sputtering Targets are carefully handled during storage and transportation to preserve the quality of our products in their original condition.
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