Different Shapes of Sputtering Targets
(주)연진에스텍은 Planar (flat) Target과 Rotary (cylindrical) Target, Circular Target 및 Ring Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.
- High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다.
- Material Variety 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
- Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
- Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
- Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.
Aluminum Oxide Sputtering Target, Al2O3
Aluminum Oxide Sputtering Target
Specification
|
Property |
Value |
|---|---|
|
Compound |
Aluminum Oxide (Al₂O₃) |
|
Appearance |
White, crystalline solid |
|
Purity Options |
99.9%, 99.95%, 99.99% |
|
Melting Point |
2,072 °C |
|
Theoretical Density |
3.97 g/cm³ |
|
Z Ratio |
0.336 |
|
Sputtering Method |
RF, RF-R |
|
Available Sizes |
Dia. 1″–6″, Thick. 0.125″–0.25″ |
|
Bonding Methods |
Indium (standard), Elastomer |
|
Custom Shapes |
Available upon request |
Note: Al₂O₃ is an electrical insulator and requires RF sputtering systems.
Aluminum Oxide Sputtering Target Application
Aluminum oxide sputtering targets are widely used in:
-
Semiconductor Devices
Gate dielectrics, passivation layers, and diffusion barriers. -
Display & LED Coatings
Transparent dielectric films for TFTs, OLEDs, and LEDs. -
Photovoltaics
Surface passivation and insulating layers in solar cells. -
Protective Optical Coatings
High-durability layers for lenses, mirrors, and AR coatings. -
Decorative & Anti-corrosive Films
Durable oxide films for consumer electronics and automotive trim.
Aluminum Oxide Sputtering Target Bonding Methods
Al₂O₃ targets are brittle ceramic materials and are typically bonded for secure operation in high-power systems. We offer:
-
Indium Bonding – High thermal conductivity, easy to remove
-
Elastomer Bonding – Flexible interface for stress-sensitive systems
-
Custom backing plates – Copper, molybdenum, stainless steel available
Packaging
All alumina targets are cleanroom-packaged, sealed against moisture, and foam-protected to prevent cracking or contamination. Batch COA and purity certificates are provided with every shipment.
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