Different Shapes of Sputtering Targets
(주)연진에스텍은 Planar (flat) Target과 Rotary (cylindrical) Target, Circular Target 및 Ring Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.
- High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다.
- Material Variety 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
- Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
- Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
- Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.
Chromium Silicon Aluminum Target (CrSiAl Target)
Overview of Chromium Silicon Aluminum Target
(CrSiAl Target)
The CrSiAl Target is an advanced alloy sputtering material that integrates chromium’s exceptional hardness, silicon’s thermal stability, and aluminum’s resistance to oxidation. This combination results in a target that delivers excellent performance in thin film deposition processes, ensuring durability and reliability in demanding environments. The homogeneous microstructure achieved through precise alloying and casting techniques ensures stable sputtering behavior and uniform film composition. The CrSiAl Target maintains a moderate melting point and exhibits good thermal expansion compatibility with various substrates, making it suitable for controlled temperature applications. Its low internal stress, strong bonding characteristics, and stable surface morphology contribute to dependable performance during extended sputtering operations.
Specifications of Chromium Silicon Aluminum Target (CrSiAl Target)
Chemical Composition: Cr, Al, Si
Purity: 99.9%
Shape: Planar Disc
Please note that the specifications provided are based on theoretical data. For customized specifications and detailed inquiries, please contact us directly.
Custom Dimensions
- Diameter: Tailored to specific requirements
- Thickness: Adjustable based on application needs
Applications of Chromium Silicon Aluminum Target (CrSiAl Target)
The CrSiAl Target is versatile and finds applications in various advanced thin film technologies due to its superior hardness, thermal stability, and oxidation resistance. Key applications include:
- Semiconductor Manufacturing: Utilized for barrier layers and wear-resistant coatings in microelectronic devices, enhancing device longevity and performance.
- Optical Coatings: Employed in the deposition of anti-reflective and protective coatings on lenses and other optical components, improving optical clarity and durability.
- Automotive and Aerospace Industries: Applied as hard, heat-resistant coatings on tools and components exposed to high temperatures and friction, such as engine parts and turbine blades.
- Cutting Tools and Molds: Enhances surface durability and reduces wear, extending the life of cutting tools and molds.
- Decorative Applications: Provides metallic luster and resistance to tarnishing, ideal for decorative coatings exposed to various environmental conditions.
Packaging Options for Chromium Silicon Aluminum Target (CrSiAl Target)
Our CrSiAl Targets are carefully packaged to ensure their integrity during transportation. Depending on the size and dimensions, smaller targets are securely placed in polypropylene (PP) boxes, while larger ones are shipped in custom-built wooden crates. We prioritize customized packaging solutions and use appropriate cushioning materials to provide maximum protection during transit.
Packaging Options:
- Carton
- Wooden Crate
- Custom Packaging
Manufacturing Process Overview
Testing Methods
- Chemical Composition Analysis: Utilizes techniques such as Glow Discharge Mass Spectrometry (GDMS) or X-Ray Fluorescence (XRF) to verify purity and composition.
- Mechanical Properties Testing: Evaluates tensile strength, yield strength, and elongation to assess material performance.
- Dimensional Inspection: Measures thickness, width, and length to ensure compliance with specified tolerances.
- Surface Quality Inspection: Identifies defects like scratches, cracks, or inclusions through visual and ultrasonic examinations.
- Hardness Testing: Determines material hardness to confirm uniformity and mechanical reliability.
Frequently Asked Questions about Chromium Silicon Aluminum Target (CrSiAl Target)
Q1: What are the advantages of using CrSiAl for thin film deposition?
A1: CrSiAl targets offer excellent hardness, high thermal and oxidation resistance, and stable sputtering behavior, making them ideal for protective, decorative, and functional coatings in demanding environments.
Q2: What deposition methods are compatible with CrSiAl Targets?
A2: CrSiAl Targets are suitable for both DC and RF magnetron sputtering systems and can be used in reactive or non-reactive atmospheres, depending on the desired film characteristics.
Q3: Can the target be customized in terms of size and composition?
A3: Yes, Stanford Advanced Materials provides CrSiAl targets in various sizes, shapes (planar or rotary), and compositions tailored to specific research or industrial requirements.
Performance Comparison: CrSiAl Target vs. Competing Materials: Performance Comparison
|
Property |
CrSiAl Target |
Pure Cr Target |
Pure Al Target |
CrAl Alloy Target |
|---|---|---|---|---|
|
Purity |
≥99.9% |
≥99.9% |
≥99.99% (HPA applications) |
≥99.5% |
|
Electrical Conductivity |
Moderate (alloy-dependent) |
High |
Very High |
Moderate-High |
|
Thermal Conductivity |
80-120 W/m·K |
90 W/m·K |
237 W/m·K |
70-100 W/m·K |
|
Thermal Stability |
Excellent (up to 1200°C) |
Good (up to 800°C) |
Moderate (melts at ~660°C) |
Good (up to 1000°C) |
|
Oxidation Resistance |
High (forms protective SiO₂ layer) |
Low (oxidizes at high T) |
Low (forms Al₂O₃ but prone to spalling) |
Moderate (depends on Al content) |
|
Deposition Rate |
Moderate |
High |
High |
Moderate |
|
Film Uniformity |
Excellent (nanoscale control) |
Good |
Good |
Good |
|
Adhesion Strength |
High (alloy bonding) |
High |
Moderate (requires bonding layers) |
High |
|
Cost |
Medium-High (alloy complexity) |
Low |
Low |
Medium |
|
Primary Applications |
Semiconductor, optical coatings |
Wear-resistant coatings |
Aerospace, electronics |
Aerospace, automotive |
Additional Information
Raw Materials – Chromium (Cr)
Physical Properties:
- Density: 7.19 g/cm³
- Melting Point: 1,907°C (3,465°F)
- Structure: Body-Centered Cubic (BCC)
- Magnetic: Non-magnetic
Chemical Properties:
- Chromium is a hard, lustrous, and corrosion-resistant transition metal known for its high melting point and exceptional hardness. It forms stable protective oxide layers that enhance its wear and oxidation resistance, making it ideal for high-temperature and harsh environment applications.
Industrial Applications:
- Superconductors: Essential for creating superconducting magnets and electronic components.
- Aerospace Alloys: Enhances strength and durability in aerospace components.
- Protective Coatings: Used in wear-resistant and oxidation-resistant coatings for tools and machinery.
- Decorative Finishes: Provides a shiny, reflective surface for decorative applications.
Raw Materials – Silicon (Si)
Physical Properties:
- Density: 2.33 g/cm³
- Melting Point: 1,414°C (2,577°F)
- Structure: Diamond Cubic
- Magnetic: Non-magnetic
Chemical Properties:
- Silicon is a metalloid fundamental to modern electronics, known for its excellent semiconducting properties and thermal stability. It forms strong bonds with oxygen, making it essential in glass, ceramics, and solar cell applications.
Industrial Applications:
- Semiconductors: Base material for most semiconductors and integrated circuits.
- Glass and Ceramics: Enhances the strength and thermal properties of glass and ceramics.
- Solar Cells: Fundamental component in photovoltaic cells for solar energy.
- Alloying Agent: Improves properties of various metal alloys.
Raw Materials – Aluminum (Al)
Physical Properties:
- Density: 2.70 g/cm³
- Melting Point: 660°C (1,220°F)
- Structure: Face-Centered Cubic (FCC)
- Magnetic: Non-magnetic
Chemical Properties:
- Aluminum is a lightweight, silvery-white metal renowned for its excellent corrosion resistance, high thermal and electrical conductivity, and low density. It naturally forms a protective oxide layer that prevents further oxidation, making it highly durable and easy to process.
Industrial Applications:
- Structural Components: Used extensively in aerospace, automotive, and construction for its strength-to-weight ratio.
- Electrical Applications: High conductivity makes it ideal for electrical wiring and components.
- Packaging: Commonly used in packaging materials like cans and foil.
- Decorative Finishes: Provides a bright, reflective surface for aesthetic applications.
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