E-Beam Evaporators
EBV Standard Electron Beam Evaporator
The Electron Beam Evaporator EBV intends to achieve high growth rates for low vapour pressure materials, especially when high purity of the evaporant is desired.
- UHV compatible, low outgassing
- High flux rates of low vapour pressure materials
- High-purity evaporation
- Hearth volumes: 40 cm³ or 100 cm³
- Long filament lifetime
- Easy maintenance
- Optimized versions for SiGe MBE available
EBVM Multi-Pocket Electron Beam Evaporator
Our Multi-pocket Electron Beam Evaporators combine flexibility in evaporating up to four different materials from a single source for thin film growth requirements.
- Linear multihearth UHV e-beam evaporator
- full UHV integrity by hermetic all-metal sealed design, low outgassing
- Bakeout temperature 200°C
- Evaporation origin aligned on flange centre
- Reliable manual linear translation, optional motorized translation with optical positioning
- Hearth volumes 8cm³ (x4 or x6); 15cm³ (x3 or x6)
- Long filament life with 270° beam deflection
- High frequency beam deflection system
EBVV Vertical Electron Beam Evaporator
The Vertical Electron Beam Evaporator EBVV features a complete electromagnetic x- and y-dynamic beam deflection system with small footprint.
- Fully UHV compatible
- Small dimensions fit onto DN63CF (O.D. 4.5'') ports
- Hearth volumes 4 cm3 or 5 cm3
- High purity evaporation of metals and dielectrica
- Long filament lifetime and easy maintenance
- 270° beam deflection
- High frequency x-y-beam deflection system
- Silicon shielding parts for use in SiGe-MBE
HV High Voltage Power Supplies
The operation of any electron beam evaporator requires a well-matching set of power supplies and a control unit, in order to generate and guide the electron beam.
- GENIUS evaporator control unit
- CARRERA high-voltage power supply
- (3 kW, 5 kW or 10 kW)
- FPS filament power supply
