Gas Sources
HABS Hydrogen Atom Beam Source
The Hydrogen Atom Beam Source HABS is a thermal gas cracker that produces an absolutely ion-free hydrogen gas beam, avoiding ion induced damage to the substrate.
- H2 dissociation typically 80-98%, depending on operation conditions
- Atomic hydrogen flux density up to 1*1016/(cm2 s)
- No high-energy particles and ions
- Low power consumption (P < 200 W)
- Integrated water cooling, low thermal load on other experimental equipment
- Integrated shutter optional
- Additional customized aperture and leak valve available
OBS Oxygen Atom Beam Source
The Oxygen Atom Beam Source OBS is a thermal gas cracker that produces an ion-free oxygen gas beam, avoiding ion induced damage to the substrate.
- O2 dissociation up to more than 80%, depending on operation conditions
- Atomic oxygen flux density up to 1x1015/cm2 s
- No high-energy particles and ions
- Low power consumption
- Integrated water cooling, low thermal load on other experimental equipment
- Optional customized aperture
FMP Flexible Microplasma Source
- N2 + O2 version on DN40CF flange; DN63CF flange size with ion sensor option
- Typical operation power and frequency: 5 - 20 W / 2.5 GHz
- Typical gas flow : 1 to 10 sccm
- Suitable for different gas types ( for example N2, H2 or O2)
- Additional equipment / options: all-metal valve, gas supply, RF generator, ion sensor, photo diode
RF Plasma Source RFP
- Nitride and Oxide MBE growth
- UHV compatible construction for RF cavity operation
- Customized aperture hole plate
- Efficient water cooled coil, low thermal load on other experimental equipment
- RF operation @ 13.56 MHz with Automatic RF tuning during operation
- Optional shutter
- Optional plasma emission monitoring
