HCP421V-MPS Vacuum Chamber Probe Station
- Tabletop design with small footprint integrates with modern instruments and benches
- -190°C - 400°C (600°C option available, see HCP621G-MPS)
- Fits 10 mm - 50 mm samples and wafers
- Sealed chamber with gas purging and/or vacuum capabilities
- 4 independent electrical probes with remote mechanical positioning
- Up to 7 probers available
STRUCTURAL FEATURES
|
Sample Area |
Fits φ10 mm-φ50 mm wafers and devices (standard) |
|
Chamber Height |
8mm |
|
Atmosphere Control |
Gas purging or vacuum capability to control humidity, condensation, and oxidation |
|
Frame Cooling |
Integrated frame cooling with optional chiller system |
|
Frame Dimensions |
300 mm x 300 mm x 40 mm |
|
Weight |
4000g |
OPTICAL FEATURES
|
Optical Access |
Reflection (transmission option available) |
|
Optical Windows |
Removable and exchangeable windows permit full-spectrum transparency |
|
Minimum Objective Working Distance |
12 mm |
|
Top Window |
50 mm diameter |
|
Top Viewing Angle |
±50° from normal |
|
Window Defrost |
Integrated external window defrost |
THERMAL FEATURES
|
Temperature Control |
mK2000 with programmable precision LVDC PID method to minimize electrical noise |
|
Thermal Block |
Silver |
|
Temperature Minimum |
-190°C (with optional liquid N2 cooling) |
|
Temperature Maximum |
400°C for vacuum version (600°C for gas tight version) |
|
Temperature Sensor |
100 Ω Platinum RTD |
|
Temperature Resolution |
0.01°C (RTD) |
|
Temperature Stability |
±0.05°C (>25°C), ±0.1°C (<25°C) |
|
Software |
Windows software to record and export temperature-time data |
ELECTRICAL FEATURES
|
Electrical Probes |
Standard tungsten-rhenium DC probes with other probe options available |
|
Probe Positioning |
XYZ micro positioners remotely manipulate probes within sealed sample chambers with 10um resolution |
|
Connectors |
BNC connector (default), or triaxial BNC connectors |
|
Sample Surface |
Grounded (default), floating, or triaxial options |
