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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 허용 오차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


FLUORIDE TARGET

Cryolite Sputtering Target, Na3·AlF6

 

 

Cryolite Sputtering Target

Description

Cryolite Sputtering Target is a material used in the sputtering process for depositing thin films onto substrates. Cryolite is a mineral compound consisting of sodium (Na), aluminum (Al), and fluorine (F) ions. In sputtering, high-energy ions are directed at the cryolite sputtering target, causing atoms or molecules to be ejected from the target surface. These ejected particles then deposit onto a substrate, forming a thin film with properties inherited from the cryolite material.

 

 

Cryolite Sputtering Target Specifications

Compound Formula

Na3·AlF6

Molecular Weight

209.94

Appearance

Gray target

Melting Point ()

950-1012

Density (g/cm3)

2.9-3.0

Available Sizes

Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″

 

Thick: 0.125″, 0.250″

 

Cryolite Sputtering Target Handling Notes

  1. Indium bonding is recommended for Cryolite Sputtering Target, due to some of its characteristics not amenable to sputtering like brittleness, low thermal conductivity, etc.
  2. This material has a low thermal conductivity and is susceptible to thermal shock.

 

 

Cryolite Sputtering Target Application

  • Optical Coatings: Cryolite thin films can be used in optical coatings for various applications, such as anti-reflective coatings and interference filters.
  • Semiconductor Manufacturing: Cryolite coatings may find applications in the semiconductor industry, particularly in the fabrication of electronic and optoelectronic devices.
  • Research and Development: Cryolite thin films may be used in research and development for specific applications where the properties of cryolite are desirable.

 

 

Cryolite Sputtering Target Packaging

Our Cryolite Sputtering Target is widely used in the production of coatings for various purposes, such as improving the wear resistance of tools, enhancing the durability of surfaces, or providing specific optical or electrical properties.

 

 

 

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