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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 허용 오차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Lithium Zinc Oxide Sputtering Target, LZO


 

Lithium Zinc Oxide Sputtering

 Target Description

 

Lithium Zinc Oxide Sputtering Target is a specific material used in the process of sputtering, which is a technique used in thin film deposition for various applications such as electronics, optics, and coatings.

The sputtering target is made up of lithium zinc oxide (LiZnO), a compound composed of lithium (Li), zinc (Zn), and oxygen (O). It is typically in the form of a solid disc-shaped material with a high purity.

During the sputtering process, a high-energy plasma is created in a vacuum chamber, and ions in the plasma bombard the sputtering target. This bombardment causes atoms from the target material to be ejected or sputtered onto a substrate, creating a thin film coating.

 

Lithium Zinc Oxide Sputtering Target Specifications

 

Compound Formula

Li:ZnO

Molecular Weight

88.33

Appearance

White Target

Density

4.59 g/cm3

Available Sizes

Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″

 

Thick: 0.125″, 0.250″

 

Lithium Zinc Oxide Sputtering Target Handling Notes

  1. Indium bonding is recommended for Lithium Zinc Oxide Sputtering Targets, due to some of its characteristics not amenable to sputtering like brittleness, low thermal conductivity, etc.
  2. This material has a low thermal conductivity and is susceptible to thermal shock.

 

Lithium Zinc Oxide Sputtering Target Application

  • Transparent Conductive Oxide (TCO) Films
  • Solar Panels
  • Gas Sensors
  • Electrochromic Devices
  • Photoelectrochemical Water Splitting
  • Anti-Reflection Coatings
  • Flexible Electronics

 

Lithium Zinc Oxide Sputtering Target Packaging

Our Lithium Zinc Oxide Sputtering Targets are carefully handled during storage and transportation to preserve the quality of our products in their original condition.

 

 

 

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