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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 허용 오차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Calcium Manganate Sputtering Target, CaMnO3


 

Calcium Manganate Sputtering

Target Description

 

Calcium Manganate Sputtering Target is a type of thin film deposition material used in the process of physical vapor deposition (PVD). PVD is a method of depositing thin films of material onto a substrate by bombarding a solid target with high-energy particles in a vacuum chamber.

Calcium Manganate Sputtering Target consists of a solid disc made of a compound composed of calcium (Ca) and manganate (MnO3). The target is typically made by compressing and sintering powdered calcium manganate.

 

Calcium Manganate Sputtering Target Specifications

Compound Formula

CaMnO3

Appearance

White target

Molecular Weight

143.01

Available Sizes

Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″

 

Thick: 0.125″, 0.250″

 

Calcium Manganate Sputtering Target Handling Notes

  1. Indium bonding is recommended for Calcium Manganate Sputtering Target, due to some of its characteristics not amenable to sputtering like brittleness, low thermal conductivity, etc.
  2. This material has a low thermal conductivity, and is susceptible to thermal shock.

 

Calcium Manganate Sputtering Target Application

Calcium Manganate Sputtering Target is used in the production of Copper Indium Gallium Selenide (CIGS) solar cells, which are thin film photovoltaic devices. CIGS solar cells have high efficiency and are flexible, making them suitable for various applications such as building-integrated photovoltaics.

 

Calcium Manganate Sputtering Target Packaging

Our Calcium Manganate Sputtering Targets are carefully handled during storage and transportation to preserve the quality of our products in their original condition.

 

 

 

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