Aluminum Oxide Sputtering Target, Al2O3
We offers high-purity aluminum oxide (Al₂O₃) sputtering targets, also known as alumina sputtering targets, for thin film deposition via RF magnetron sputtering. As a chemically stable, wide-bandgap ceramic material, Al₂O₃ is ideal for use in insulating, dielectric, and optical coatings. Our alumina targets are fabricated with high density and ultra-fine microstructure, ensuring low arcing, stable deposition rates, and uniform thin film quality. Aluminum Oxide Sputtering Target Specification Property Value Compound Aluminum Oxide (Al₂O₃) Appearance White, crystalline solid Purity Options 99.9%, 99.95%, 99.99% Melting Point 2,072 °C Theoretical Density 3.97 g/cm³ Z Ratio 0.336 Sputtering Method RF, RF-R Available Sizes Dia. 1″–6″, Thick. 0.125″–0.25″ Bonding Methods Indium (standard), Elastomer Custom Shapes Available upon request Note: Al₂O₃ is an electrical insulator and requires RF sputtering systems. Aluminum Oxide Sputtering Target Application Aluminum oxide sputtering targets are widely used in: Semiconductor Devices Gate dielectrics, passivation layers, and diffusion barriers. Display & LED Coatings Transparent dielectric films for TFTs, OLEDs, and LEDs. Photovoltaics Surface passivation and insulating layers in solar cells. Protective Optical Coatings High-durability layers for lenses, mirrors, and AR coatings. Decorative & Anti-corrosive Films Durable oxide films for consumer electronics and automotive trim. Aluminum Oxide Sputtering Target Bonding Methods Al₂O₃ targets are brittle ceramic materials and are typically bonded for secure operation in high-power systems. We offer: Indium Bonding – High thermal conductivity, easy to remove Elastomer Bonding – Flexible interface for stress-sensitive systems Custom backing plates – Copper, molybdenum, stainless steel available Packaging All alumina targets are cleanroom-packaged, sealed against moisture, and foam-protected to prevent cracking or contamination. Batch COA and purity certificates are provided with every shipment.