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Sputtering Targets

Different Shapes of Sputtering Targets


(주)연진에스텍Planar (flat) TargetRotary (cylindrical) Target, Circular TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.

  • High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다. 
  • Material Variety  다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다. 
  • Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다. 
  • Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다. 
  • Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다. 


 

Description of Nickel Chromium Iron Target

(NiCrFe Target)

 

The Nickel Chromium Iron (NiCrFe) Target is a durable alloy sputtering material renowned for its superior thermal stability, oxidation resistance, and mechanical robustness. The synergistic combination of nickel, chromium, and iron results in a chemically stable matrix that withstands high-temperature degradation and corrosion, making it ideal for challenging deposition environments. Nickel contributes to structural integrity and ductility, chromium imparts strong oxidation and corrosion resistance, while iron enhances mechanical strength and magnetic properties. This alloy ensures excellent adhesion and uniformity during sputtering and possesses thermal expansion properties compatible with a variety of substrates. NiCrFe targets are perfect for creating durable and stable thin films in applications that demand performance under thermal cycling, harsh atmospheres, or mechanical stress.

 

Specifications of Nickel Chromium Iron Target (NiCrFe Target)

  • Chemical Composition: Ni, Cr, Fe
  • Purity: 99.9%
  • Shape: Planar Disc
  • Size:
    • Thickness: 3 mm ± 0.5 mm (customizable)
    • Diameter: 50 mm ± 1 mm (customizable)

Note: The specifications above are based on theoretical data. For custom requirements and detailed inquiries, please contact us.

 

Applications of Nickel Chromium Iron Target (NiCrFe Target)

  • Microelectronics and Semiconductor Devices: Ideal for barrier layers, adhesion layers, and resistive films where thermal and chemical stability are crucial.
  • Thin Film Resistors: Commonly used in the production of thin film resistors due to its stable resistivity and low temperature coefficient of resistance (TCR).
  • Aerospace and Automotive Coatings: Suitable for high-temperature and corrosive environments, such as engine parts or sensor coatings exposed to thermal cycling.
  • Heating Elements and Sensors: Utilized in sputtered films for precise heating elements, temperature sensors, and thermocouples, benefiting from its electrical resistivity and oxidation resistance.
  • Protective and Functional Coatings: Applied to components that require resistance to oxidation, wear, or corrosive atmospheres, such as industrial tooling or reactor parts.
  • Magnetic and Electromagnetic Shielding: The iron component provides magnetic properties, making NiCrFe films useful for specific magnetic or shielding applications.

 

Packaging of Nickel Chromium Iron Target (NiCrFe Target)

Our NiCrFe Targets are packaged in customized cartons tailored to the size of the material. Smaller targets are securely placed in polypropylene (PP) boxes, while larger ones are housed in specially designed wooden crates. We ensure precise packaging customization and use appropriate cushioning materials to provide maximum protection during transit.

  • Packaging Options: Carton, Wooden Box, or Customized.

 

Manufacturing Process

Brief Manufacturing Process Flow

Testing Methods

  1. Chemical Composition Analysis: Techniques such as Glow Discharge Mass Spectrometry (GDMS) or X-Ray Fluorescence (XRF) are used to verify purity and control impurity levels.
  2. Mechanical Properties Testing: Includes assessments of tensile strength, yield strength, and elongation to evaluate material performance.
  3. Dimensional Inspection: Measures thickness, width, and length to ensure adherence to specified tolerances.
  4. Surface Quality Inspection: Detects defects like scratches, cracks, or inclusions through visual and ultrasonic examinations.
  5. Hardness Testing: Measures material hardness to confirm uniformity and mechanical reliability.

 

FAQs for Nickel Chromium Iron Target (NiCrFe Target)

Can you customize the shape and size of the target?

Yes, we offer fully customizable planar targets in various diameters, thicknesses, and geometries to meet specific sputtering system requirements.

What are the key performance benefits of NiCrFe targets?

NiCrFe targets provide excellent thermal and chemical stability, high mechanical strength, and reliable resistivity control, making them ideal for thin film resistor fabrication and coatings in harsh environments.

Are these targets suitable for both DC and RF sputtering?

Absolutely, NiCrFe targets are compatible with both DC and RF sputtering systems, depending on the film requirements and deposition setup.

 

Performance Comparison Table with Competing Products

Nickel Chromium Iron Target (NiCrFe Target) vs. Competing Materials

Performance Parameters

NiCrFe Target

Pure Nickel (Ni)

NiCr 80/20 Alloy

Stainless Steel 304

Composition

Ni:Cr:Fe = 70:20:10, ≥99.9%

Ni ≥99.9%

Ni:Cr = 80:20

Fe:Cr:Ni = 70:19:11

Density (g/cm³)

8.2-8.5

8.90

8.4-8.6

7.9-8.0

Thermal Conductivity (W/m·K)

12-15

90

11-14

15-17

Electrical Resistivity (μΩ·cm)

110-130

6.9

108-115

72-90

Melting Point (°C)

1400-1450

1455

1400-1420

1400-1450

Oxidation Resistance

Excellent (≤1000°C)

Poor (oxidizes above 400°C)

Good (≤1200°C)

Moderate (≤800°C)

Corrosion Resistance

High (acid/alkali resistance)

Low (prone to corrosion)

Moderate

High (passive Cr layer)

Mechanical Strength

High (tensile ≥500 MPa)

Low (ductile)

Moderate (≥400 MPa)

High (≥520 MPa)

Key Applications

Resistive films, heating elements, aerospace coatings

Conductive layers, EMI shielding

Heating coils, thermocouples

Structural parts, chemical reactors

 

Additional Information

Raw Materials – Nickel

Basic Properties

  • Atomic Number: 28
  • Atomic Weight: 58.69 g/mol
  • Density: 8.908 g/cm³
  • Melting Point: 1455°C
  • Characteristics: Silvery-white, ferromagnetic at room temperature, highly malleable and ductile, and resistant to corrosion. Remains stable in air under standard conditions.
  • Oxidation States: Primarily +2; occasionally +1, +3, or +4.

Chemical Properties

  • Corrosion Resistance: Forms a protective nickel oxide (NiO) layer in moist air; moderately resistant to acids and bases, especially when passivated by concentrated nitric acid.
  • Alloying Capability: Easily forms alloys with elements such as iron, copper, and chromium (e.g., stainless steel, Nitinol).
  • Catalytic Activity: Extensively used in hydrogenation reactions, including the hardening of vegetable oils.

Applications

  • Stainless Steel Production: Accounts for over 70% of global nickel consumption, enhancing corrosion resistance and mechanical strength.
  • Battery Materials: Essential in nickel-metal hydride (NiMH) and lithium-ion batteries (e.g., NMC cathodes).
  • Electroplating: Used for corrosion protection and decorative finishes.
  • High-Temperature Alloys: Utilized in jet engines, gas turbines, and nuclear reactors for superior heat resistance.
  • Catalysts: Employed in industrial hydrogenation and desulfurization processes within petrochemical refining.

Resources and Production

  • Major Reserves: Indonesia (largest global reserves), Philippines, Russia.
  • Mining Forms: Extracted from sulfide ores (e.g., pentlandite) and laterite (oxide) ores.
  • Environmental Impact: Nickel smelting processes emit sulfur oxides (SOx) and heavy metal pollutants.

 

Raw Materials – Chromium

Physical Properties

  • Density: ~7.19 g/cm³
  • Melting Point: 1907°C
  • Boiling Point: 2671°C
  • Hardness: Very high; among the hardest metals (Mohs hardness ≈ 8.5)
  • Appearance: Silvery with a high polish; resists tarnishing.

Chemical Properties

  • Oxidation Resistance: Chromium forms a thin, stable oxide layer (Cr₂O₃) on its surface, providing excellent resistance to oxidation and making it ideal for corrosion-resistant applications.
  • Oxidation States: Primarily +3 and +6, with Cr(III) being stable and Cr(VI) being highly reactive and toxic.
  • Reactivity: Reacts with strong acids and oxidizing agents but resists attack by air and moisture at room temperature.

Industrial Significance

  • Stainless Steel Production: Extensively used as an alloying element in stainless steels and superalloys to enhance corrosion resistance.
  • Electroplating: Chromium plating provides a hard, mirror-like, protective finish on metals.
  • Pigments: Chromium compounds, especially Cr(VI), are used in pigments for paints and ceramics (e.g., chrome yellow, chrome green).
  • Sputtering Targets & Thin Films: Pure chromium and chromium-based alloys are widely used in PVD coatings, electronics, and surface protection.

Environmental and Health Considerations

  • Cr(III): An essential trace element for humans, involved in glucose metabolism.
  • Cr(VI): Toxic and carcinogenic; handling and disposal must follow strict safety regulations.

 

Raw Materials – Iron

Physical Properties

  • Density: ~7.87 g/cm³
  • Melting Point: 1538°C
  • Boiling Point: 2862°C
  • Magnetism: Ferromagnetic at room temperature (until ~770°C, Curie point)
  • Appearance: Lustrous silver-gray when freshly cut, but easily oxidizes in air.

Chemical Properties

  • Oxidation: Iron readily forms oxides, such as Fe₂O₃ (rust) and Fe₃O₄, especially in moist air.
  • Oxidation States: Commonly exists in +2 and +3 oxidation states (Fe²⁺, Fe³⁺).
  • Reactivity: Reacts with dilute acids to produce hydrogen gas. While reactive, it can form a passive layer in certain environments that protects it from further corrosion.

Industrial Importance

  • Steel Production: The primary component in steelmaking, where it is alloyed with carbon and other elements to produce a wide range of structural materials.
  • Magnetic Materials: Used in transformers, motors, and data storage due to its magnetic properties.
  • Electronics & Thin Films: Iron and its alloys (like NiFe, FeCr) are utilized in sputtering targets and coatings for magnetic and structural applications.
  • Catalysts: Employed in chemical processes such as the Haber-Bosch process for ammonia synthesis.

Biological Role

  • Essential Element: Iron plays a central role in oxygen transport (hemoglobin), enzyme function, and cellular metabolism.

Safety and Handling

  • General Safety: Bulk metallic iron is generally safe and non-toxic.
  • Powder Form: Fine iron powders can be flammable and should be handled in controlled environments.

 

 

 

 


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