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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 허용 오차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Lithium Carbonate Sputtering Target, Li2CO3


 

Lithium Carbonate Sputtering

Target Description

Lithium

 

Lithium carbonate sputtering target is a white sputter target with the formula Li2CO3. It is widely used in the processing of metal oxides.

Lithium is a chemical element originated from the Greek ‘lithos’ meaning stone. It was first mentioned in 1817 and observed by A. Arfwedson. The isolation was later accomplished and announced by W. T. Brande. “Li” is the canonical chemical symbol of lithium. Its atomic number in the periodic table of elements is 3 with location at Period 2 and Group 1, belonging to the s-block. The relative atomic mass of lithium is 6.941(2) Dalton, the number in the brackets indicating the uncertainty. 

CarbonCarbon is a chemical element originated from the Latin ‘carbo’, meaning charcoal. “C” is the canonical chemical symbol of carbon. Carbon has a hexagonal crystal structure. It has superimposed countless parallel layers. The carbon atoms in each layer are distributed on the top corners of the regular hexagonal plane, forming an ordered arrangement in a three-dimensional space. It has good electrical and thermal conductivity, good electrical and thermal conductivity, chemical stability, and lubricity. 

 

Lithium Carbonate Sputtering Target Specification

Material Type

Lithium Carbonate

Symbol

Li2CO3

Color/Appearance

White Solid

Molecular Weight

73.9

Density

2.11 g/cm3

Melting Point

723 °C

Available Sizes

Dia.: 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

 

Lithium Carbonate Sputtering Target Packing

Our lithium carbonate sputtering targets are clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

 

 

 

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