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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 허용 오차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Lithium Iron Phosphate Sputtering Target, LiFePO4


 

Lithium Iron Phosphate Sputtering

Target Description

Lithium iron phosphate sputtering target is a mixed oxide ceramic sputtering target, usually made by high-temperature sintering/recrystallization of oxide mixture of Li and Fe. Lithium iron phosphate is a gray, red-grey, brown or black solid that is insoluble in water. It has very special physical properties and has special applications in the electronics, superconductivity, and optical industries.

 

Lithium Iron Phosphate Sputtering Target Specification

Material Type

Lithium Iron Phosphate Sputtering Target

Symbol

LiFePO4

Color/Appearance

Metallic, Solid

Melting Point

>300 °C

Sputter

RF, RF-R, DC

Type of Bond

Indium, Elastomer

Available Sizes

Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

 

Lithium Iron Phosphate Sputtering Target Applications

Lithium Iron Phosphate (LiFePO4) sputtering targets find applications in various fields, especially in the development of lithium-ion batteries and energy storage systems. These targets are crucial for depositing thin films of LiFePO4 on substrates. LiFePO4 is known for its stability, high energy density, and safety, making it a popular choice for rechargeable batteries.

 

Lithium Iron Phosphate Sputtering Target Bonding Services

Indium bonding and Elastomer bonding are available for the LiFePO4 sputtering materials. Stanford Advanced Materials is devoted to machining standard backing plates and working together with the Taiwan Bonding Company to provide bonding services. .


 

 

Lithium Iron Phosphate Sputtering Target Packing

Our lithium iron phosphate sputter targets are tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

 

 

 

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