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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 허용 오차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Lithium Borate Sputtering Target, Li2B4O7

 

 

Lithium Borate Sputtering

Target Description

Lithium

 

Lithium borate sputtering target is also known as lithium tetraborate sputter target. It is an inorganic compound with the formula Li2B4O7.

Lithium is a chemical element originated from the Greek ‘lithos’ meaning stone. It was first mentioned in 1817 and observed by A. Arfwedson. The isolation was later accomplished and announced by W. T. Brande. “Li” is the canonical chemical symbol of lithium. Its atomic number in the periodic table of elements is 3 with location at Period 2 and Group 1, belonging to the s-block. The relative atomic mass of lithium is 6.941(2) Dalton, the number in the brackets indicating the uncertainty.

Boron

Boron is a chemical element originated from the Arabic ‘buraq’, which was the name for borax. “B” is the canonical chemical symbol of boron. The abundance of Boron ranks third in the earth’s crust. The most important role of boron is to improve the hardenability of steel, so it can increase the hardenable size of steel, or improve the uniformity of microstructure and properties in the cross-section of steel after quenching and quenching. 

 

Lithium Borate Sputtering Target Specification

Material Type

Lithium Borate

Symbol

Li2B4O7

Color/Appearance

White Solid

Molecular Weight

169.12

Density

2.4 g/cm3

Melting Point

917 °C

Available Sizes

Dia.: 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

 

Lithium Borate Sputtering Target Packing

Our lithium borate sputtering targets are clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

 

 

 

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