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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 허용 오차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Thorium Oxide Sputtering Target, ThO2

 

Thorium Oxide Sputtering

Target Description

Thorium is a chemical element that originated from Thor, the Scandinavian god of thunder. It was first mentioned in 1829 and observed by J. Berzelius. “Th” is the canonical chemical symbol of thorium. Its atomic number in the periodic table of elements is 90 with location at Period 7 and Group 3, belonging to the f-block. The relative atomic mass of thorium is 232.03806(2) Dalton, the number in the brackets indicating the uncertainty.

 

 

Thorium Oxide Sputtering Target Specifications

Material Type

Thorium Oxide (ThO2)

Symbol

ThO2

Color/Appearance

White, Crystalline Solid

Purity

99.9% min

Density

9.7 g/cm³

Available Sizes

Diameter: 2.0″ to 16.0″
Thickness: 0.125″ to 1″

Shape

Disc, Plate, Custom-made

We also offer other customized shapes and sizes of the sputtering targets, please inquire for more information.

 

Thorium Oxide Sputtering Target Applications

Thorium Oxide Sputtering Targets find application in a range of high-tech industries:

  1. Optical Coatings: Used in precision optical coatings due to its high refractive index and excellent light-transmitting properties.
  2. Thin-Film Electronics: Vital in the production of advanced thin-film transistors and integrated circuits.
  3. Research and Development: Ideal for scientific research in materials science and condensed matter physics.
  4. Semiconductor Fabrication: Crucial for depositing thin films in semiconductor device manufacturing.

 

Thorium Oxide Sputtering Target Packing

Our Thorium Oxide Sputtering Targets are clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

 

 

 

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