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Sputtering Targets

Different Shapes of Sputtering Targets


(주)연진에스텍Planar (flat) TargetRotary (cylindrical) Target, Circular TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 타겟 크기의 커스터마이즈가 가능합니다.


Pure Metal Target

Scandium Planar Target

YEONJIN S-Tech Corporation 2025-11-19 10:42:28 20

 

Scandium Planar Target Overview

SAM’s scandium targets are fabricated from high-purity scandium metal (99.9%), and come in diameters ranging from 50 mm to 200 mm, with thicknesses between 3 mm and 10 mm. The targets are engineered to have a grain size smaller than 50 µm and a density greater than 95%, ensuring consistent sputtering and the production of high-quality films. Each target is packaged in argon-filled, vacuum-sealed containers and undergoes rigorous validation through ICP-MS and XRD to comply with ASTM F3091 standards.

Scandium Planar Specifications

  • Purity: 99.9%
  • Melting Point: 1814°C
  • Boiling Point: 3103°C
  • Shape: Rectangular or customized as per request
  • Size: Customized upon request

Note: All product specifications are based on theoretical data. Please contact us for any specific requirements or detailed inquiries.

 

Scandium Planar Applications

  1. Aerospace Alloys: Scandium-doped aluminum films for lightweight, high-strength components.
  2. Solid Oxide Fuel Cells (SOFCs): Scandium-stabilized zirconia coatings for electrolytes.
  3. Lasers & Lighting: Scandium-based films for high-intensity lamps and UV lasers.
  4. Semiconductors: Scandium nitride layers for high-electron-mobility transistors (HEMTs).

 

Scandium Planar Packaging

SAM’s scandium planar targets are packaged in cartons, with sizes tailored to the dimensions of the material. Smaller items are packed in secure PP boxes, while larger items are carefully placed in custom wooden crates. The packaging ensures optimal protection during transit, with cushioning materials chosen to prevent damage.

Packaging Options: Cartons, Wooden Boxes, or Custom Solutions.

 

Scandium Planar Manufacturing Process

  • Manufacturing Process Flow Overview

  • Testing Methods
    • Chemical Composition Analysis: Ensures the required purity level through techniques like GDMS or XRF.
    • Mechanical Properties Testing: Includes tests for tensile strength, yield strength, and elongation.
    • Dimensional Inspection: Verifies thickness, width, and length according to tolerances.
    • Surface Quality Inspection: Inspects for surface defects like cracks, scratches, or inclusions using visual and ultrasonic methods.
    • Hardness Testing: Assesses material hardness to ensure mechanical reliability.

 

Scandium Planar FAQs

  • Q1: What purity grades are available for scandium targets?
    • A1: SAM provides 99.9% purity (3N) scandium, with impurity levels under 100 ppm, certified by ICP-MS.
  • Q2: How should scandium targets be stored?
    • A2: Store in dry argon environments to avoid oxidation. Handle with gloves to prevent contamination.
  • Q3: Are your scandium targets compatible with magnetron sputtering systems?
    • A3: Yes, SAM targets are compatible with ISO/KF flanges and most magnetron sputtering systems. Adapter solutions are available.

 

Performance Comparison: Scandium Rotary vs. Planar Target

Feature

Scandium Rotary Target

Scandium Planar Target

Material Utilization

Up to 80-90%

Around 30-40%

Service Life

Longer

Shorter

Coating Uniformity

More uniform

May have variations

Production Cost

Higher initial cost

Lower initial cost

Applications

Large-area coatings

Small-area coatings

Sputtering Stability

More stable

Less stable

Compatible Equipment

Rotary sputtering systems

Traditional planar systems

 

Raw Material Details

  • Atomic Number: 21
  • Melting Point: 1541°C
  • Density: 2.99 g/cm³
  • Common Uses: Aerospace, fuel cells, lighting
  • Fun Fact: Scandium is lighter than aluminum but significantly strengthens it when alloyed.

 

 

 

 

  • High Purity & Performance 일관된 증착 품질과 오염을 줄이도록 가공합니다. 
  • Material Variety  다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다. 
  • Custom Manufacturing 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다. 
  • Precision Design 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다. 
  • Flexible Supply Chain 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다. 


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