Unlock atomic precision in thin film research
Experience the next generation of thin film innovation with Demcon TSST Pulsed Laser Deposition systems. Engineered for excellence, our PLD systems, optionally featuring advanced in situ RHEED technology, empower researchers to achieve atomic-level control and reproducibility across a wide spectrum of materials, including complex oxides.
Trusted by leading institutions, our solutions deliver proven results in the most demanding research environments.
Why choose Demcon TSST?
- Academic collaborations: Continuously sharing expertise with the renowned materials science group at the University of Twente, our systems embody the latest breakthroughs in thin film growth and process optimization.
- Ultimate flexibility: Effortlessly tailor every essential parameter, gas mixtures, process pressure, target-tosubstrate distance, and substrate temperature, with unmatched precision, enabling you to push the boundaries of your research.
- Comprehensive support: From on-site installation and acceptance testing by our expert engineers to hands-on user training and yearly organised PLD workshops, we ensure our systems facilitate monolayer growth control using RHEED. Our dedicated support team and intuitive software with robust data logging guarantee fast, effective remote assistance whenever you need it.
Transform your research capabilities and achieve results that set you apart. Discover how Demcon TSST PLD systems can elevate your laboratory to new heights of performance and reliability.
SYSTEM SPECIFICATIONS
|
Vacuum chamber |
|
|
Chamber: |
Spherical, including ports for RHEED |
|
Base pressure: |
<10-7 mbar |
|
Pumpline: |
Turbo (300l/s), manual gate valve, manual bypass line for pumpspeed control |
|
Process gasses: |
Two MFC controlled process gasses (e.g. O₂, Ar, N₂) |
|
Pressure control: |
Automated upstream pressure control |
|
Deposition geometry: |
Vertical |
|
Quick access door for easy access, sample and target transfer |
|
|
Heater stage |
|
|
Heating method: |
Radiative heating |
|
Temperature: |
<1000°C |
|
Sample size: |
<2” substrates, flagstyle sample plate platform compatible |
|
Sample manipulation: |
XY-range 25mm, Z-range 100mm, azimuth and continuous rotation |
|
Shutter, allows use of RHEED while closed |
|
|
Target stage |
|
|
Movement: |
Target rastering, XY range 25mm, Z range 100mm, target select |
|
Amount of targets: |
up to 6 |
|
Targetsize: |
1” |
|
Whole target carousel transfer through loadlock |
|
|
Demcon TSST control software |
|
|
Full manual to automated control, including growth recipes and parameter logging |
|
OPTIONS AND UPGRADES
|
Loadlock |
|
|
Pumpline: |
Turbo (>70l/s) |
|
Base pressure: |
<10-5 mbar |
|
Both sample and target carousel transfer |
|
|
High pressure RHEED |
|
|
Electron gun specifications: |
30kV |
|
Operational process pressure”: |
<0.5mbar, differentially pumped |
|
Heater stage |
|
|
Heating method: |
Laser heating |
|
Temperature: |
>1100°C |
|
Sample size: |
<10x10mm substrates, flagstyle sample plate platform compatible |
|
Sample manipulation: |
XY-range 25mm, Z-range 100mm, azimuth and continuous rotation |
|
Shutter, allows use of RHEED while closed |
|
|
Optics and laser |
|
|
Fluence range flexibility for complex materials and metal ablation, fully enclosed beam delivery optics |
|
|
Excimer laser: |
400-800mJ, 10-50Hz Beam delivery optics with clipping mask imaging for homogeneous spotsize and fluence control |
|
Nd:YAG laser: |
100mJ @ 266nm, 10Hz |
|
Additional options: |
Manual beam attenuator, laser energy meter |
