The evaporation process is a common technology for PVD coating, and it comprises evaporating source materials in a vacuum chamber below 1 × 10−6 torr (1.3 × 10−4 Pa) and condensing the evaporated particles on a substrate. Usually, the heating element which was used for evaporating source materials is often referred to as an "evaporation crucible".
Evaporation sources are generally made of refractory metals (with very high melting points) such as Cu, W, Mo, or Ta, with or without ceramic coatings, or refractory ceramic materials such as quartz, Al2O3, ZrO2, BN, BN-TiB2 and graphite.
Alumina (Al2O3) Crucible
- High thermal conductivity
- Excellent thermal shock resistance
- Low thermal expansion
- Exceptional heat resistance
- Good Chemical Inertness
- High electrical resistance
- Low dielectric constant and loss tangent
- High volume resistivity
- Excellent machinability
Tantalum (Ta) Crucible
- High melting point up to 2996°C
- Highly resistant to corrosion
- Moderate hardness and ductility
- Excellent chemical properties
- Does not react to hydrochloric acid, concentrated nitric acid and aqua regia under hot and cold conditions
- It can be used to manufacture evaporation vessels and can also be used as electrodes, rectifiers and electrolytic capacitors for electronic tubes
Molybdenum (Mo) Crucible
- High density over 10g/cm3
- It has great strength under high temperature, anti-friction corrosion resistance
- High thermal conductivity
- High thermal expansion coefficient
- Ra<6.3
- Mainly used as containers and heating element for evaporation coating machine in optical glasses and spectacles field
- Excellent machinability
Tungsten (W) Crucible
- High density over 18.7g/cm3
- Excellent corrosion resistance
- High melting and boiling points
- High temperature strength
- High abrasion resistance
- Ra<6.3
- The crucible can be used in vacuum inert gas environment under the temperature of 3400℃
- Excellent machinability
Copper (Cu) Crucible
- High density
- Excellent corrosion resistance
- Low resistivity
- High Strength
- Ra<6.3
- Using temperature below 1083.4ºC in vacuum or deoxidize atmosphere
- Excellent machinability
Niobium (Nb) Crucible
- High density
- Excellent corrosion resistance
- Low resistivity
- High Strength
- Ra<6.3
- Using temperature below 2450ºC in vacuum or deoxidize atmosphere
- Excellent machinability
Boron Nitride (BN) Crucible
- High thermal conductivity
- Excellent thermal shock resistance
- Low thermal expansion
- Exceptional heat resistance
- Good Chemical Inertness
- High electrical resistance
- Low dielectric constant and loss tangent
- High volume resistivity
- Excellent machinability
All other evaporation crucible available on request.
Customization available.
The most common evaporation sources we make are the following 3 types.
Wire type evaporation sources
It’s made from tungsten wire and can be formed into filaments, baskets, heaters or looped shaped point sources.
Boat type evaporation sources
It’s made from tungsten, tantalum, molybdenum or ceramic type materials capable of withstanding high temperatures.
Crucible liners type evaporation sources
It’s made from tungsten, tantalum, molybdenum, copper, graphite and refractory ceramic materials.
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- 분류 : 박막증착타겟
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