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Plasma Surface Treatment System

(Henniker Plasma, UK)

Functional nano-coatings
Plasma clean
Improved wettability and adhesion

Nebula

NEBULA

 

NEBULA plasma surface treatment systems feature large-format vacuum chambers along with many advanced features, all with the reliability of recipe-driven PLC control.

They are configurable tools that are both robust enough for reliable, repeatable industrial processing and at the same time flexible enough for the research into, and development of, leading-edge plasma processes.

The NEBULA range has been designed around our core technologies in plasma surface treatment and plasma process development. With chamber volumes ranging from 50L to 150L, each instrument may be configured with multiple parts tray/electrodes for either horizontal or vertical mounting arrangements. Additionally, a high capacity rotary drum mechanism can be chosen for the treatment of large numbers of small parts for example.

NEBULA plasma systems are used for cleaning, adhesion improvement and enhanced wetting of surfaces via plasma surface activation. Treatments can be performed equally on metals, polymers, composites, glass and ceramics.

A unique feature of each NEBULA system is the addition of an optional monomer dosing inlet. This is a fully automated device for the introduction of a wide range of liquid monomers to produce permanently functionalised surfaces via plasma polymerisation, greatly extending the range of plasma surface treatment possibilities in a single machine.

 

FEATURES
  • 30L – 150L chamber volumes
  • Horizontal, vertical and rotary drum parts tray options
  • Plasma polymerisation inlet
  • PLC control
  • Fully automated, recipe-driven processes

 

 
PROCESS CONTROL

Portals Software

The Nebula System operation is controlled via the Portals software application, a unique and custom piece of software accessible via PC Touch-screen HDMI interface with PLC controller. Feature full recipe control (unlimited recipes) with operator, technician and administrator level logins capabilities.

 

PLASMA ENVIRONMENT

Chamber capacity & options

 

The Nebula is available in 30L-150L capacity, the chamber can be customised to suit a wide variety of applications. Standard configurations include;

  • Horizontal/Verticle shelving loading electrodes
  • Rotary drum electrode

 

Monomer delivery

Plasma polymerisation is performed via our automated vapour delivery inlet with monomer reservoir. This allows controlled deposition of a wide range of nano-scale polymer coatings on complex 3D objects. Surfaces can be made permanently wettable or oppositely permanently liquid repellent. Other functional properties include bio-compatibility and anti-microbial.

 

BENEFITS
  • Compact stand alone unit
  • User friendly recipe driven interface
  • Unlimited recipes and steps per recipe
  • Fast treatment time
  • Precise & repeatable
  • No hazardous emissions
  • Liquid dosing inlet option

 

 

 

SPECIFICATION

Technical Specifications

 Nebula 30 - 50 - 100 - 150L

ENCLOSURE

Dimensions

Base model: W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

Weight

~100-120kg depending on model

CHAMBER

Material

Stainless Steel

Form

Rectangular

Dimensions

30L - 300mm W x  300mm H x 365mm L

50L - 300mm W x 300mm H x 560mm L

100L - 400mm W x  400mm H x 625mm L

150L - 400mm W x 600mm H x 625mm L

REMOVABLE PARTS CARRIER

Material

Aluminium/Stainless steel

Form

Flat horizontal trays, vertical carriers, rotary drum, user defined

PLASMA POWER SUPPLY 

Power

0-1000W, continuously variable output

Frequency

50kHz

PROCESS CONTROL

Interface

15” Colour TFT, Windows 10, PLC Control - Unlimited steps/recipes with user access privileges

Gas channels

1-3 Digital Mass Flow Controllers - monomer dosing inlet optional

Vent inlet

x1

Vent inlet options

soft ventilation option

Purge inlet

x1

Connections

6mm compression or 1/4 compression optional

Pressure gauge

Pirani sensor

Vacuum pump

12 to 40 m3/hr pumping speed

Vacuum pump options

2-stage rotary pump (air/inert gas), PFPE rotary pump (oxygen compatible), dry pumps. All pumps include exhaust filter and connections

SERVICES

Electrical

380-400 VAC/3~/N/PE, max current 16A/phase, 50Hz

Power cord

Suited to region

Compliance

CE – UKCA - ROHS - WEEE

**Henniker strive for continuous improvement and specifications are subject to change without notice

 


 

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