메뉴 건너뛰기

Vacuum Deposition Source and Parts

Gencoa, UK

Circular magnetron

Standard Circular

YEONJIN S-Tech Corporation 2025-10-29 10:34:53 7

Large circular

Gencoa’s large circular magnetrons are available in target sizes ranging from 6" to 16", and with a choice of magnetic and mechanical options to suit a range of applications.

Every option is built to the high build standards that has become the trademark of Gencoa's products, and a 10 year warranty is offered on the magnetic arrays of 6" target sizes or greater.

 

Mechanical Options

Gencoa standard circular magnetrons come with a wide choice of mechanical options. All magnetrons are available for internal or external mount. Mechanical options for each target size are detailed in the table below. For target sizes of 2" to 5", refer to Gencoa's 3G circular magnetron range.

 

 

6"

8"

10"

12"

14"

16"

Tilting shaft mount

Gas Injection

RF Power Option

Anode Cooling

Manual Shutter

Auto Shutter

Sputter Chimney

Wallmount feedthrough

Hidden anode

 

Magnetic Options

As standard, Gencoa provide a balanced (SW) magnetic array on its standard circular magnetrons. Additional magnetic options are available for each target size, as detailed below.

 

6"

8"

10"

12"

14"

16"

Balanced (SW)

 

 

 

 

Unbalanced (PP)

 

 

 

 

High Yield (HY)

High Uniformity (HU)

High Strength (HS)

 

Gallery



 

 

검색 결과 4건

  • 분류 : Circular magnetron
문의
하기