메뉴 건너뛰기

Vacuum Deposition Source and Parts

Gencoa, UK

(주)연진에스텍 진공증착 소스 

Gencoa의 Rectangular 혹은 Rotatable Magnetron Source는 Speedflo 공정 컨트롤러 및 Optix RGA 센서와 같은 공정 툴과 함께 사용가능합니다.

Rectangular planar magnetron

Compact rectangular

YEONJIN S-Tech Corporation 2025-10-29 10:45:06 121

Compact cathode

 

To serve markets requiring a simpler cathode design in as small a footprint as possible, Gencoa have introduced the 'compact' range, offering cathodes which are significantly smaller than standard cathodes and have fewer mechanical features.

 

The compact cathodes can be supplied with direct or indirect cooling, with or without anodes and can be used in simpler DC and AC applications with targets typically up to 1m in length.

 

The compact magnetron designs meet the requirements of a small format magnetron to fit into existing ports and provide high power operation. The magnetrons are highly robust in terms of ability to withstand a harsh environment.

  • directly cooled 5", 6" or 8” wide targets of variable length 
  • compact cathode body (as small as 6.8” wide for 6” target)
  • no anode (uses chamber flange)
  • >40% target use with HY magnetics
  • no Heli-coils used; the cathode body is made from a hard ‘bearing’ type material that allows power tools to be used and prevents seizing

 

Gallery


 


 

Rotatable Magnetron

The Gencoa Rotatable System (GRS) family of rotatable magnetrons covers four styles of end-block, with two options of internal flange mount style, and options for horizontal cantilever and vertical mounted rotatables. .. more

Circular Magnetron

Gencoa offer a comprehensive range of circular magnetrons, catering for applications from R&D to semiconductor production. A wide selection of configurations result in solutions for challenging demands of real processes. ..more

Rectangular Magnetron

Gencoa have a well-established track record of providing rectangular planar magnetrons and technology for coating of flexible substrates, architectural glass, solar cells, displays, touch screens and semiconductor wafers. In particular, the electrical insulation of our cathodes mean we are the partner of choice for any high power RF or HIPIMS application. .. more

Plasma Sources

Gencoa provide a range of plasma source technology based upon DC, AC and HIPIMS power modes, and for applications including pre-cleaning, coating removal and ion beam deposition. .. more

문의
하기