GRS-M

The GRS-M product is a high capacity 'drop-in' rotatable magnetron for target diameters of 152mm and above, and target lengths of up to 2m, in a vertical or horizontal orientation.

Whilst able to accommodate high target loads, the space required for the GRS-M is reduced as a result of the Gencoa patented rotational drive system. To make the most of the compact nature, the GRS-M is hence ideal for vertical display coaters or horizontal in-line coating systems.

When combined with Active Anodes higher rate and quality oxides and ITO layers are produced.

GRS-M Advantages

• Double seals for target mounting and double screws target fixing
• Unique patented drive system provides a compact and high capacity end block design
• High water flow (60 l/min)
• Market leading integrity of vacuum seals – better than 5x10^-8 mbar l/s He leak rate under rotation
• Utilises Gencoa’s high performance magnetics including balanced, unbalanced, high strength and DLIM options
• Low deflection magnet bar support tubes
• Can incorporate an active anode in dual configuration for higher density, low defect and low stress layers
• Unique seal design for reliable operation sets it apart from other competitors
• High uniformity in a confined space, 107mm from outer edge of endblock to race-track
• Can be used in conjunction with Gencoa gas bars, active anode, Optix and Speedflo

GRS-M  Key features

• Up to 2m long targets possible, greater depending upon weight and orientation depending on weight
• Flange mounted to drop into a chamber opening
• Accommodation of Ø152mm targets
• 1” ID quick release water connections for high flow
• DC motor drive with RS-485 interface and possible PLC integration
• Power connections: DC via 7/16 or AC/DC via Harting
• Operational speed up to 15RPM
• Single or dual units can be mounted on a single flange plate
• Complete drop-in assemblies available with Active Anodes, multi-zone gas delivery bars and drive/water monitoring

GRS-M  Gallery