(주)연진에스텍 진공증착 소스
Gencoa의 Rectangular 혹은 Rotatable Magnetron Source는 Speedflo 공정 컨트롤러 및 Optix RGA 센서와 같은 공정 툴과 함께 사용가능합니다.
Large circular
Gencoa’s large circular magnetrons are available in target sizes ranging from 6" to 16", and with a choice of magnetic and mechanical options to suit a range of applications.
Every option is built to the high build standards that has become the trademark of Gencoa's products, and a 10 year warranty is offered on the magnetic arrays of 6" target sizes or greater.
Mechanical Options
Gencoa standard circular magnetrons come with a wide choice of mechanical options. All magnetrons are available for internal or external mount. Mechanical options for each target size are detailed in the table below. For target sizes of 2" to 5", refer to Gencoa's 3G circular magnetron range.
|
6" |
8" |
10" |
12" |
14" |
16" |
|
|
Tilting shaft mount |
• |
• |
• |
• |
• |
• |
|
Gas Injection |
• |
• |
• |
• |
• |
• |
|
RF Power Option |
• |
• |
• |
• |
• |
• |
|
Anode Cooling |
• |
• |
• |
• |
• |
• |
|
Manual Shutter |
• |
• |
• |
• |
• |
• |
|
Auto Shutter |
• |
• |
• |
• |
• |
• |
|
Sputter Chimney |
• |
• |
• |
• |
• |
• |
|
Wallmount feedthrough |
• |
• |
• |
• |
• |
• |
|
Hidden anode |
• |
• |
• |
• |
• |
• |
Magnetic Options
As standard, Gencoa provide a balanced (SW) magnetic array on its standard circular magnetrons. Additional magnetic options are available for each target size, as detailed below.
|
|
6" |
8" |
10" |
12" |
14" |
16" |
|
Balanced (SW) |
• |
• |
|
|
|
|
|
Unbalanced (PP) |
• |
• |
|
|
|
|
|
High Yield (HY) |
• |
• |
• |
• |
• |
• |
|
High Uniformity (HU) |
• |
• |
• |
• |
• |
• |
|
High Strength (HS) |
• |
• |
• |
• |
• |
• |
Gallery
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Rotatable Magnetron
The Gencoa Rotatable System (GRS) family of rotatable magnetrons covers four styles of end-block, with two options of internal flange mount style, and options for horizontal cantilever and vertical mounted rotatables. .. more
Circular Magnetron
Gencoa offer a comprehensive range of circular magnetrons, catering for applications from R&D to semiconductor production. A wide selection of configurations result in solutions for challenging demands of real processes. ..more
Rectangular Magnetron
Gencoa have a well-established track record of providing rectangular planar magnetrons and technology for coating of flexible substrates, architectural glass, solar cells, displays, touch screens and semiconductor wafers. In particular, the electrical insulation of our cathodes mean we are the partner of choice for any high power RF or HIPIMS application. .. more
Plasma Sources
Gencoa provide a range of plasma source technology based upon DC, AC and HIPIMS power modes, and for applications including pre-cleaning, coating removal and ion beam deposition. .. more
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