(주)연진에스텍 진공증착 소스
Gencoa의 Rectangular 혹은 Rotatable Magnetron Source는 Speedflo 공정 컨트롤러 및 Optix RGA 센서와 같은 공정 툴과 함께 사용가능합니다.
Power supplies
The iM300 and iM3000 offer a complete solution for Gencoa IM type linear and circular plasma sources. All of the functions needed to operate the source are built-in.
The only user action is to connect the high voltage cable and the mass flow controller.
The necessary control sequence and power delivery is performed by the iM300 and iM3000 controller.
The unit is equipped with a modern, IGBT based resonant converter and the overall operation is handled with a microcontroller subsystem.
Both units can provide ~2.8kV strike voltage and 2.5A short circuit current.
Max output power is 500W @2500V output voltage for the iM300 and 4000W @2000V output voltage for the iM3000.
The built in software can drive external mass flow controller to maintain the source voltage (and so the beam energy) at a preset value. The features of the iM300 and iM3000 makes setup, operation and regulation of the plasma source very straight-forward.
Power supplies Specifications
|
iM3000 |
iM300 |
|
|
Unit |
rack 19“ 4 HU |
1/2 rack 19" 3 HU |
|
Main |
400 VAC 3 Ph |
240 or 110 VAC with switch selector inside |
|
Voltage strike |
3 kV positive |
3 kV positive |
|
Nominal voltage |
2500 V/4 kW |
2500 V/500 Watt |
|
Short circuit current |
2 A |
300 mA |
|
Regulation mode |
Current (5 mA resolution) |
Current (0.5 mA resolution) |
|
Output connector |
FISHER HV female mod 105 |
BNC SHV female |
|
MFC |
2 channels analog 0/5 VDC |
2 channels analog 0/5 VDC |
|
Display |
Touch screen 240 x 128 pixel |
Touch screen 240 x 128 pixel |
|
Interlock/remote |
9 pin D type |
9 pin D type |
|
RS 232 |
9 pin D type |
9 pin D type |
|
Regulation mode |
Internal constant gas flow, or gas feedback (constant voltage), via external RS 232 or analog user port |
Internal constant gas flow, or gas feedback (constant voltage), via external RS 232 or analog user port |
Rotatable Magnetron
The Gencoa Rotatable System (GRS) family of rotatable magnetrons covers four styles of end-block, with two options of internal flange mount style, and options for horizontal cantilever and vertical mounted rotatables. .. more
Circular Magnetron
Gencoa offer a comprehensive range of circular magnetrons, catering for applications from R&D to semiconductor production. A wide selection of configurations result in solutions for challenging demands of real processes. ..more
Rectangular Magnetron
Gencoa have a well-established track record of providing rectangular planar magnetrons and technology for coating of flexible substrates, architectural glass, solar cells, displays, touch screens and semiconductor wafers. In particular, the electrical insulation of our cathodes mean we are the partner of choice for any high power RF or HIPIMS application. .. more
Plasma Sources
Gencoa provide a range of plasma source technology based upon DC, AC and HIPIMS power modes, and for applications including pre-cleaning, coating removal and ion beam deposition. .. more
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