Our passion is to combine creativity and technical skills for solving complex technological and social issues. We want to have a direct or indirect impact on people and their living environment. That’s why we design and manufacture advanced systems and products and we are proud to share our results, where confidentiality permits.
linear transfer line.
DTU, Lyngby, Denmark.
At DTU Denmark TSST installed a 6 meter linear transfer line connecting three TSST PLD systems and a sputter system.
HIGHLIGHTS
- Vacuum level is 10-9mbar
- Connecting four systems, six in total possible
- Motorised movement
- TSST heaters, target carousels and flag-style plate compatible
This linear transferline is compatible with TSST resistive heaters, TSST target carousels and equipped with a storage facility holding TSST heaters, target carousels and flag-style sample plates. The system comes with a vacuum suitcase which can be connected to the transfer chamber for transfer of flag-style sample plates.
This linear transferline is compatible with TSST resistive heaters, TSST target carousels and equipped with a storage facility holding TSST heaters, target carousels and flag-style sample plates. The system comes with a vacuum suitcase which can be connected to the transfer chamber for transfer of flag-style sample plates.
UHV PLD RHEED system with laser heating.
IOP Czech Academy of Science, Prague, Czech Republic.
TSST installed an elaborate UHV PLD RHEED system with laser heating at FZU, Prague.
HIGHLIGHTS
The system is equipped with RHEED, laser and resistive heating, and prepared for possible upgrades including ellipsometry and evaporation sources.
- Bake out table for UHV
- Laser heating
- Prepared for ellipsometry and evaporation sources
"the system is placed on a bake-out table for thorough bake out with a bake out tent, ensuring 10-10mbar UHV base pressure."
PLD system cluster.
University of Latvia, Riga, Latvia
HIGHLIGHTS
Strategically designed optics ensure quick switching of the beam line between both systems while maintaining reproducible control of laser parameters. Both systems are equipped with resistive heating. One system is specifically designed to handle corrosive gasses.
- First TSST system in Latvia
- One beamline for two systems
- One system made compatible for corrosive gases
"this first TSST system in Latvia consists of two PLD systems sharing one Coherent excimer laser."
LCVD system.
National University of Singapore, Singapore.
TSST in collaboration with Coherent developed this unique custom designed CVD system, handling up to 10x10 mm substrates.
HIGHLIGHTS
TSST developed the full CVD gas handling hardware and software control, ensuring full control over all steps during the CVD process, taking into account all required and necessary safety features.
- Laser chemical vapor deposition system
- Connected to a Coherent excimer laser setup
- Handling of up to 10×10 mm substrates
"the software allows to program scanning patterns of the large sample with respect to the excimer laser beam to activate surfaces."
PLD RHEED system with radiative heating.
University of Waterloo, Waterloo, Canada.
HIGHLIGHTS
- Radiation heating for 2-inch samples, compatible with flagstyle sample plates
- 5DOF sample manipulation for RHEED studies and monolayer growth control
- Beam scanning for growth on larger areas
This PLD-RHEED system is equipped with radiative heating for up to 2-inch samples, also compatible with flagstyle sample plates.
The heating stage is uniquely designed with five degrees of freedom, necessary for sample alignment during RHEED experiments.
To improve thickness homogeneity on larger samples, the beamline is equipped with beam scanning, which allows controlled and preprogrammed scanning motion of the laser pulse over the target.
This highly complete system combines the possibility of full thin-film monolayer growth control on small samples, with the possibility of upscaling to 2-inch samples.
PLD system prepared for RHEED, AES.
University of Southern California, USA.
HIGHLIGHTS
The highly customized chamber design of this oxide PLD system solution allows future upgrade with RHEED and several other techniques including AES probe.
- Shared optics with 2 other TSST systems
- Prepared for future connection to RHEED, AES probe
"a custom designed laser beamline connects the excimer laser with two existing TSST systems and this PLD setup. "
