Sputtering Power Supplies
HIPIMS GENERATORS FOR IONIZED MAGNETRON SPUTTERING
HiPIMS Generators
- 10 kW, 1 MW peak power
- 1 kV, 1 kA, 1-500 Hz pulse frequency
- 400 VAC 3 phase input, 50/60 Hz
- RS-232, RS-485, analog interface
- Active front panel control
- DC unit, high power pulsar and cable matching unit
