SHQ-SHC - COMBINATION HEATING/COOLING

In applications where substrate heating and cooling is required in the same process, AJA has developed some units which operate over a limited temperature range as the optimum designs for heating and for cooling are diametrically opposed.  Nonetheless, the specific applications vary greatly and certain combinations work nicely.  

SH-CES - CUSTOM ENGINEERED SOLUTIONS

AJA has custom engineered dozens of special substrate heater solutions since 1989. Versions include heaters for square substrates, heaters with a transverse magnetic field, in-situ motorized tilt (shadow depositions) and mask exchange systems (combinatorial chemistry and general patterning). If a custom design is required, please provide details and a sketch if possible and e-mail or fax your requirement to AJA for a prompt quotation.

PLANETARY HOLDERS

Domed wafer planetaries are commercially available and can be easily integrated into many AJA systems.  The (4) x 4" flat planetary shown here was developed by AJA and has been operating without downtime for over 10 years.  The individual 4' wafer holders can be disengaged without tools for convenient bench (top) loading. The entire assembly rotates and each wafer rotates azimuthally as is typical with most planetary designs.  Adding a simple shield allows for front side heating of the wafer surfaces.