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Thermal Properties Analyzer

Thermal Conductivity (Lambda), Ash Fusion, Thermal Screening, Microscopic Hot/Cold Stage, Wafer Chuck, Thermal Plate, Thermal Probe Station

PSH COMPREHENSIVE ANALYTICAL PROBE STATION


  • Stable structure with quick-lifted and fine-tuned Platen
  • Suitable for probe card installation and usage
  • Compatible with high magnification metallographic microscope
  • Up to 12 inch wafer testing
  • Precision linear screw drives with zero back lash
  • Comfortable large handle
  • Internal circuit / electrode / PAD probe
  • LD / LED / PD Light intensity / wavelength testing
  • IV / CV Characteristic testing of materials / devices
  • High frequency characteristic device testing up to 300GHz

 

SPECIFICATIONS

Model

SH-6

SH-8

SH-12

Dimensions

820mm x 720mm x 890mm

960mm x 850mm x 900mm

1300mm x 920mm x 920mm

Weight

170 kg

230 kg

300 kg

Power

220V, 50 - 60 Hz

Chuck

Size & Rotation

6" & 360°

8" & 360°

12" & 360°

XY Range

6" x 6"

8" x 8"

12" x 12"

Resolution

1 μm

Sample fixed mode

Vacuum adsorption

Electrical design

Electrical floating with banana plug adapters, can be used as backside electrode

Platen

U Shape

6 micropositioners

8 micropositioners

12 micropositioners

Moving range & adjustment mode

Platen can be quickly lifted up and down 6mm for fast probe tip separation

Platen can be fine tuned up and down 25 mm precisely with 1 μm resolution

Microscope

XY Travel range

2" x 2", 50.8 mm

Moving resolution

1 μm

Switching object lens

Microscope tilting 30° manually by lever

Magnification

20 - 4000X

Lens specification

Eyepiece: 10X, Objective lens: 5X, 10X, 20X, 50X, 100X (optional)

CCD Pixel

50W (analog) / 200W (digital) / 500W (digital)

Micropositioning

XYZ Range

8 mm x 8 mm x 8 mm or 12 mm x 12 mm x 12 mm

Mechanical resolution

10 μm, 2 μm, 0.7 μm, 0.1 μm

Current leakage accuracy

10 pA / 100fA (with shielding box)

Cable connectors

Banana head / Alligator clip / Coaxial / Triaxial

Optional Accessories

Chuck quick roll out mechanism

Coaxial / Triaxial chuck

Low current / capacitance test

Shielding box

Vertical fine adjustment

Integral sphere integration

Special adapter

Rotation fine adjustment

Fixture for fiber optic coupler test

Vibration free table

Light intensity / wavelength testing

Fixture for PCB/IC test

Gold-plated chuck

RF testing accessories

Active probe

Microscope tilting mechanism

Microscope pneumatic lifting mechanism

Laser repair with cutting ablation and welding function

Probe clamp

Dark field/DIC/Normarski test/light intensity/wavelength test

IC hotspot detection by LC

High voltage measurement

High current measurement

High/low temperature chuck

Application

Wafer test, photoelectric device test, PCB/IC test, RF test, high voltage and high current measurements

PSH COMPREHENSIVE ANALYTICAL PROBE STATION




 

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