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MBE, Molecular Beam Epitaxy System

Dr. Eberl MBE-Komponenten GmbH, Germany

Trusted expertise since 1990

35 years of development and manufacture of complex systems and components for multiple tasks

Industrial MBE Sources

PEZ-G Production Scale CIGS Evaporation Source

PEZ-G Production Scale CIGS Evaporation Source
  • Large capacity up to 55 kg Cu
  • Very high flow rate up to 220 g/h for Cu
  • Long lifetime
  • Designed for easy maintenance
  • Proprietary encapsulation of heater and shielding
  • Simple ingot handling
  • High material efficiency through beam shaping insert
  • Encapsulated thermocouple
  • Pyrometeric temperature control option
  • Well proven in the field

 

 

LES Production Scale Linear Evaporation Source

LES Production Scale Linear Evaporation Source
  • Large capacity up to 6000 cm³
  • High flow rate
  • Long lifetime
  • Propriatary encapsulation of heater and inner shielding
  • Excellent homogeneity due to beam shaping nozzle design
  • Encapsulated thermocouple
  • Evaporation zones up to 220 cm width

 

PVSS Production Scale Valved Selenium and Sulfur Source

Linear evaporation source applied in industrial thin film deposition processes. The unique design of the source provides excellent performance in terms of stability and homogeneity.

PVSS 320-9600 for industrial applications

 
  • Reservoir Volume 9600 cm³, larger volume on request
  • Pneumatically actuated normally closed valve
  • Easy refill
  • Optimized for fast maintenance
  • Robust heater design
  • Water-cooled assembly
  • Option for carrier gas version

 

Point Sources

Our PEZ-series sources are proven technology for industrial production of CuInGaSe (CIGS) thin film solar cell co-deposition.


 

 
  • Large capacity up to 55 kg Cu
  • Very high flow rate up to 220 g/h for Cu
  • Long lifetime
  • Designed for easy maintenance
  • Proprietary encapsulation of heater and shielding
  • Simple ingot handling
  • High material efficiency through beam shaping insert
  • Encapsulated thermocouple
  • Pyrometeric temperature control option
  • Well proven in the field

 

Valved Sources

The PVSS is a valved selenium / sulfur source, which is employed in high efficiency CIGS and CIS solar cell production.


 

  • Reservoir Volume 9600 cm³, larger volume on request
  • Pneumatically actuated normally closed valve
  • Easy refill
  • Optimized for fast maintenance
  • Robust heater design
  • Water-cooled assembly
  • Option for carrier gas version

 

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