SUBSTRATE HOLDERS - HEATERS

Since 1989 AJA International, Inc. has developed and manufactured a wide variety of UHV and HV substrate heaters and rapid annealing stations based on quartz lamp and SiC element technology. All designs are 100% oxygen compatible. High power lamps are economical and easily serviced.  Substrate rotation is required for sizes greater than 2". SiC element heaters can achieve higher temperatures and are capable of heating a larger substrate that is not rotating (for gradient film depositions).

AJA’s reliable substrate heaters can heat substrates from room temperature up to 800°C, 850°C or 1000°C depending on size and heater style.  Substrates up to 300 mm Ø can be heated in AJA tools. Optional, transferable substrate carriers are available which will allow the heaters to accommodate full size substrates or a number of small samples.

RF (or DC) biasing is optional for fixed and rotating models and permits both substrate pre-cleaning and simultaneous low energy ion bombardment during deposition to enhance adhesion, film density and film properties. Reactive gas injection rings / distributors and manual / motorized positioning are also available on most units. 

Finally, to provide a fully integrated, cost effective solution, AJA builds its own compact SHQ-15A/25A PID power supply / temperature controller units and MXMC (multi axis) and SXMC (single axis) motor controllers for substrate articulation.

Substrate Holders - Heating

• Quartz lamp or SiC
• Substrate rotation and Z motion
• Programmable tilting
• RF/DC bias option
• Full O2 compatibility
• High efficiency 
• Water cooled shielding
• Substrate shutters (wedge, total)

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SUBSTRATE HOLDERS - COOLING

AJA International, Inc. has developed and manufactured a wide variety of cooled substrate holders for situations where substrates need to be actively cooled or be kept at limited temperatures. These range from LN2 reservoir to LN2 drip to water cooled versions depending on the application.  Custom, backside He gas cooled models are available for ion milling or sputter down configurations.  Special cryogenic coldfinger models have also been built although these do not permit substrate rotation. 
Sizes from 1" to 300mm Ø are available.  RF (or DC) biasing is possible for some designs.  

Substrate Holders - Cooling

• H2O and LN2 
• Substrate rotation and Z motion
• RF/DC bias option
• Backside He/N2/Ar gas cooling
• Programmable tilting
• Substrate shutters (wedge, total)

SUBSTRATE HOLDERS - SPECIALTY 

AJA International, Inc. has frequently been called on to develop a specialty substrate holder, heater, cooler, etc. when existing designs would not accomplish the researcher's objective.  This often involves detailed design consultations (typically free of charge) where new design ideas are explored in conjunction with AJA's extensive experience.  Some of these efforts have resulted in new "standard specialty holders" such as the ones shown below. 

• Transverse magnetic field versions
• Programmable indexing spider 
• Heating/cooling combinations
• Combinatorial chemistry designs
• Scanning/rastering carriers
• Planetary designs for 3D parts coating

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