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Thermal Properties Analyzer

Thermal Conductivity (Lambda), Ash Fusion, Thermal Screening, Microscopic Hot/Cold Stage, Wafer Chuck, Thermal Plate, Thermal Probe Station

HCC ROUND WAFER CHUCKS


  • Round thermal wafer chucks
  • Designed for wafer handling
  • Modern electrical probing and testing
  • Multi vacuum zones for different wafer sizes
  • Optional cooling down to -100°C
  • Optional triaxial for pA current measurements

 

FEATURES

Surface Options

  • Standard: clear anodized aluminum
  • Optional: nickel, zinc, or gold plating

Wafer Vacuum Control

  • Independent vacuum channels
  • Custom vacuum holes available

Lift Pin

Optional

Base Cooling

Integrated base cooling via hose barb ports with optional chiller system

Mounting

  • Probe station mounting capability
  • Custom adapter options

Surface Electrical Options

grounded (R), floating (RF), or triaxial (RT) surfaces

BNC Connector Options

Coaxial, floating, or triaxial BNC

Temperature Control

  • mK2000 with programmable precision switching PID method
  • Optional LVDC PID method to minimize electrical noise

Temperature Sensor

100 Ω Platinum RTD

Temperature Resolution

0.01°C

Temperature Stability

±0.05°C (above 25°C) and ±0.1°C (below 25°C)

Power Supply

115 V or 230 V depending on region

Software

Windows software to record and export temperature-time data

 

MODELS

Model

Dimensions

Fits Samples

Weight

Temperature Range

Maximum Rate

 

 

MIN

MAX

 

MIN

MAX

Heating

Cooling

HCC206R/RF

200 mm x 176 mm x 32.62 mm

45mm

150mm

2.0 kg

-100°C

200°C

+30°C/min

-15°C/min

HCC206RT

200 mm x 176 mm x 32.62 mm

45mm

150mm

2.5 kg

-80°C

200°C

+15°C/min

-8°C/min

HCC306R/RF

200 mm x 176 mm x32.62 mm

45mm

150mm

2.0 kg

-100°C

300°C

+30°C/min

-15°C/min

HCC208R/RF

250 mm x 200 mm x 32.5 mm

100mm

200mm

3.5 kg

-80°C

200°C

+50°C/min

-5°C/min

HCC208RT

250 mm x 200 mm x 32.5 mm

100mm

200mm

4.0 kg

-80°C

200°C

+15°C/min

-3.5°C/min

HCC308R/RF

250 mm x 200 mm x 32.5 mm

100mm

200mm

3.5 kg

-80°C

300°C

+50°C/min

-5°C/min

HCC20CR/RF

365 mm x 325 mm x 40 mm

100mm

300mm

8.0 kg

-80°C

200°C

+15°C/min

-1.5°C/min

HCC20CRT

365 mm x 325 mm x 40 mm

100mm

300mm

10.0 kg

-80°C

200°C

+12°C/min

-1.2°C/min

HCC30CR/RF

365 mm x 325 mm x 40 mm

100mm

300mm

8.0 kg

-80°C

300°C

+15°C/min

-1.5°C/min




Instec, Inc. USA
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