The AT610 is the most cost-effective 6″ thermal ALD tool on the market.
- Small Footprint Desktop System
- Semiconductor-grade metal sealed lines and high temperature compatible fast pulsing ALD valves.
- Ultrafast MFC for integrated inert gas purge.
- 6 inch circular chuck (up to 7″ square) customizable for smaller sizes or other shapes (11 mm tall).
- 3 organometallic precursors and 2 (up to 3) counter reactants.
- Heated lines throughout (from precursor to chamber).
- All aluminum (semiconductor grade) chamber ‒ range up to 310°C
- 7” touchscreen PLC controller (no PC required).
