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ALD, Atomic Layer Deposition Systems

ANRIC Technologies, USA

AT-OZONE Generator

The ATOzone (Ozone Generator) system utilizes high quality components that deliver high concentration (up to 12%) ozone in a very small form. The system does not require expensive and bulky water cooling. The built-in high velocity fans keep the plasma cell cool even during prolonged or constant use.

Manual or automatic switching between ozone, oxygen and off positions.

  • Ozone production range: 12% by weight at low flow,  6% at high flow.
  • Integrated O2 regulator: 3 – 29 psi
  • High capacity ozone destructor for off-cycle ozone flow
  • Can be controlled by 3 – 24V input signal
  • Override switch for manual ozone control
  • Front panel switch for O2 or Ozone output selection

 


 

 

 

 
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