Thin Film Deposition Components & Software
Niobium Software
The custom software supplied with the HEX range enables full recipe control and allows multiple users to create complex deposition runs in a matter of minutes. The functions available include;
- Shutter operation
- Gas flow control
- Valve control
- Custom programme creation for specific deposition runs
- Thickness measurement and rate monitoring
- Sample rotation
- Logging
- Load lock pump down and venting
- Chamber pressure control
- Pump control
- Sample heating
- Power control for all sputtering and thermal sources
QCM – Deposition Thickness & Rate Monitors
Quartz Crystal Monitoring measures a mass variation per unit area by measuring the change in frequency of a quartz crystal resonator. The resonance is disturbed by the addition or removal of a small mass due to oxide growth/decay or film deposition at the surface of the acoustic resonator.
The HEX QCM enables the monitoring of deposition rate and thickness for all of the sources in the components range and is available in both manual and fully automated versions.
Accessories- Shutters and Source Holders
All Korvus Technology deposition sources and instruments can be held securely by a source holder.
This allows routine maintenance, target switching, crucible replacement and much more to be carried out efficiently and easily by all users.
High Vacuum Load Locks
The HEX series HEX-L also has the option of incorporating a high vacuum load lock. This can be pumped down in under 10 minutes and allows samples to be introduced without breaking the vacuum of the systems main chamber.
Sample, Viewport and Instrument Shutters
All of the deposition components and sample stage options for the HEX series come with shutters in order to control the deposition of materials. They can be either manually operated or there is also the option of adding fully automated shutters to the system, enabling full system control from a laptop, using our custom software Niobium.
System Panels
The HEX series has a wide range of side panel options for the customisation of a deposition chamber such as;
- Viewport panels – to assist in the monitoring of the deposition process
- Blank (chamber wall) panels
- Gas line panels – for introducing gas into the chamber for reactive thin film deposition or post deposition annealing.
- Instrument panels – for the attachment of the HEX range or deposition instruments.
- Bespoke top and bottom panels – enabling custom sample stage and pumping options.
The HEX QCM enables the monitoring of deposition rate and thickness for all of the sources in the components range and is available in both manual and fully automated versions.
In-Situ Measurement
All of the systems in the HEX series can be equipped with a selection of in-situ measurement devices for applications such as;
- Dual band optical monitoring for thickness measurement.
- Broadband optical monitoring for the analysis of transmission and reflection spectrums of deposited layers.
- Spectroscopic ellipsometry for thickness and composition analysis.
