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Thin Film Deposition System

Modular PVD System - The HEX Series (Korvus Technology, UK)

Home > Products > 진공증착장비 (Vacuum Deposition System) > Thin Film Deposition System > 박막증착시스템 (Korvus Technology - Thin Film Deposition System)

HEX Series Thin Film Deposition Systems

The HEX Series is a modular platform designed for flexibility and user customization. Key features include:

  • Modular Design: The HEX systems allow users to configure and upgrade their setups easily, accommodating various deposition techniques such as e-beam evaporation, RF and DC sputtering, and thermal evaporation. 
  • User Control: The systems can be operated both manually and automatically, providing a high level of control over the deposition process. 
  • Applications: The HEX Series is utilized for a range of applications, including thin film training programs, contact metallization, and the fabrication of solid-state batteries.
진공 증착시스템

HEX UHV

THE HEX SERIES

World's Most Modular UHV System

 

The HEX UHV is the latest development in the HEX series of PVD Instruments. The system is capable of reaching ultra-high vacuum levels of 1 x 10-10 mbar, whilst maintaining the unique open frame concept design of the HEX series. This is achieved through a novel sealing design, which would allow each panel to still be removed if wished. The ability to remove panels allows an unmatched ability for the system to be modified or upgraded at a later date, if research goals change.

 

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